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| | Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor - US Patent 6416726 (Site not responding. Last check: 2007-11-03) |
 | | The alkaline earth metal element in the reagent acts to decompose nitrogen fluoride and sulfur fluoride, in the presence of the elemental carbon. |
 | | If the relative amount of the alkaline earth element is too small, the relative ratio of the amount of the alkaline earth metal element, contributing to the decomposition reaction, to the amount of carbon lowers as the reaction proceeds, and it becomes impossible to obtain a high decomposition ratio. |
 | | The alkali metal element, for example, K, may be contained in the reagent by incorporating the same in the form of a compound such as a hydroxide, a carbonate, a phosphate, an aluminate, a nitrate or a sulfate. |
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