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| | Quinone diazide containing photoresist composition utilizing mixed solvent of ethyl lactate, anisole and amyl acetate - ... (Site not responding. Last check: 2007-10-08) |
 | | Typical solvents useful in this invention are anisole, ethyl lactate, methyl lactate, ethyl-2-ethoxy acetate, methyl-2-methoxy acetate, methyl-3-methoxy propionate, ethyl-3-methoxy propionate, pyruvic aldehyde dimethylacetal, acetol, ethyl 2-ethoxy-2-hydroxyacetate, ethyl -2-hydroxyisobutyrate, amyl acetate, hexyl acetate, and methylacto acetate. |
 | | Example 126; 2.007 g of PAC and 10.693 g of novolac resin was dissolved into 5.036 g of anisole, 5.036 g of amyl acetate and 27.23 g of ethyl lactate. |
 | | A composition consisting of 10.575 g of the resin of Example 1 and 1.925 g of the PAC of Example 18 were dissolved into a solvent consisting of 5.063 g of anisole, 5.063 g of amyl acetate and 27.535 g of ethyl lactate followed by filtration through a 0.2.mu.m Teflon filter. |
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