| | Reflectance method to determine and control the temperature of thin layers or wafers and their surfaces with special ... |
 | | Due to the relationship between direct bandgap and optical absorption coefficient.alpha., analysis of the reflected optical radiation will provide an indication of the direct bandgap of the material which, in turn, is indicative of the material's temperature. |
 | | The property of the material on which this invention is based is the dependence of the bandgap on temperature, and the dependence of the optical absorption coefficient,.alpha., of light of a given energy on the difference between the latter and the bandgap energy (which must be smaller than the light energy). |
 | | The figure shows the change in the direct bandgap of a semiconductor as a function of temperature (the example is a semiconductor, such as GaAs, whose direct bandgap decreases as the temperature increases). |
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