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Appendix C. Tohoku University |
 | | In addition to Dr. Esashi, there are Associate Professor Shuichi Shoji, three assistant professors, one postdoctoral researcher, fourteen researchers on leave from various companies, twenty-one students (four in the doctoral program, eight in the master's program, and nine undergraduates), one technician, and one secretary. |
 | | 1993), microactuators (Minami, Kawamura, and Esashi 1993), dry micromachining using RIE at low-temperatures (Takinami 1992), bonding (Esashi, Ura, and Matsumoto 1992), feedthroughs, and sensor-circuit integration (Nagata et al. |
 | | Esashi, M. "Sensor for Measuring Acceleration." In Mechanical Sensors, ed.N.F. de Rooij, VCH Pub. |
| www.wtec.org /loyola/mems/c_tohoku.htm (1111 words) |
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