| |
| | Plasma Ion Source, filamentless microwave ECR source, rf, plasma, microwave, ECR, plasma ion source, atom source, broad ... (Site not responding. Last check: 2007-10-09) |
 | | The source can be operated in four distinct modes, according principally to the extraction optics fitted and covering a wide range of ion energies and particle types. |
 | | This mode combines atom source and ion source behavior to produce a source which behaves like the atom source at (1.) above until potentials are applied to the extraction grids when ions are then added to the beam. |
 | | Removes the residual ion current from the beam when the source is being used in atom source mode. |
| www.specs.de /products/MBE/Ion-Source/Mini-Plasma-Source.htm (981 words) |
|