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| | MICRO:Ultrapure Fluids, by Dennis Capitanio, (Jan '97, p.39) |
 | | Recirculating hot-acid baths are widely used in the semiconductor industry for wet-etching, stripping, and cleaning silicon wafers. |
 | | Capitanio D, and Gotlinsky B, "Methodology for Evaluating Particulate Control in Aggressive Chemicals for the Semiconductor Industry," in Proceedings of the 39th Annual Technical Meeting of the IES, Mount Prospect, IL, Institute of Environmental Sciences, pp 218224, 1993. |
 | | James Molinaro is senior vice president of sales, service, and technology for SubMicron Systems, Allentown, PA. He is one of two cofounders of the advanced semiconductor and silicon wafer automated process equipment company, which was established in 1989. |
| www.micromagazine.com /archive/97/01/capitan.html (2000 words) |
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