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| | MSP Corporation |
 | | MSP participated with and guided NIST and SEMI Standards in the development of the calibration protocol (SEMI 3094 document) in order that SSIS tools around the world are uniformly calibrated for size accuracy. |
 | | Real-world process particles, such as SiO2, Al2O3, TiO2, Si3N4, Si, Ti, W, Ta, Cu, etc. are deposited on the surface with narrow, size distributions to create Particle Wafer Standards in support of yield improvements in the fab. |
 | | Many of MSP's products are covered by U.S. and foreign patents. |
| www.mspcorp.com (526 words) |
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