| | Mark Allen (Site not responding. Last check: 2007-10-12) |
 | | Mark G. Allen received the B.A. degree in Chemistry, the B.S.E. degree in Chemical Engineering and the B.S.E. degree in Electrical Engineering from the University of Pennsylvania in 1984, and the S.M. degree and the Ph.D. in microelectronic materials from M.I.T. in 1986 and 1989 respectively. |
 | | He joined the faculty of Georgia Institute of Technology after a postdoctoral appointment at M.I.T. Professor Allen's current research interests are in the field of micromachining and in microsensor and microactuator fabrication that is compatible with the IC fabrication. |
 | | Other interests are in micromachined pressure and in acceleration sensors, micromotors, in integrated flow valves, in piezoelectric materials combined with semiconductor circuits and optical materials, in multi-chip packaging for integrated circuits and microstructures, in integration of organic piezoelectric materials with semiconductor circuits for sensing and actuation, and in materials and mechanical property issues in micromachining. |
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