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| | Multibeam laser drilling apparatus - Patent 6849824 |
 | | Provided is a multi-beam laser drilling apparatus for drilling a workpiece, simultaneously at two positions while telecentric errors are suppressed, in which a conventional optical system in which galvanometer mirrors are used for a first laser beam, and a galvanometer-mirror system is located close to an f.theta. |
 | | Thus, the galvanometer mirrors 1a, 1b, 2a, 2b can be located closer to one another, and accordingly, telecentric errors of the f.theta. |
 | | Further, since the galvanometer mirrors can be located closer to one another, the scanning width of the second laser beam 10 can be decreased on the galvanometer mirrors 1a, 1b, and accordingly, the sizes of the galvanometer mirrors 1a, 1b can be decreased. |
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