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Topic: Nanolithography

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	Nanolithography - nCyclopedia
		Nanolithography — or lithography at the nanometer scale — refers to the fabrication of nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm.
		Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits or nanoelectromechanical systems (NEMS).
		As of 2006, nanolithography is a very active area of research in academia and in industry.
	nanotitan.com /nCyclopedia/nanolithography.htm (424 words)

	Nanolithography - Wikipedia, the free encyclopedia
		Nanolithography — or lithography at the nanometer scale — refers to the fabrication of nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm.
		Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits or nanoelectromechanical systems (NEMS).
		As of 2006, nanolithography is a very active area of research in academia and in industry.
	en.wikipedia.org /wiki/Nanolithography (439 words)

	nanolithography - a definition from Whatis.com
		Nanolithography is the art and science of etching, writing, or printing at the microscopic level, where the dimensions of characters are on the order of nanometers (units of 10
		This includes various methods of modifying semiconductor chips at the atomic level for the purpose of fabricating integrated circuits (ICs).
		Instruments used in nanolithography include the scanning probe microscope (SPM) and the atomic force microscope (ATM).
	whatis.techtarget.com /definition/0,,sid9_gci515046,00.html (199 words)

	Nanolithography Overview - Definition and Various Nanolithography Techniques
		Nanolithography is the science of etching, writing or printing to modify a material surface with structures under 100nm.
		Dip-Pen Nanolithography (DPN) is a direct write lithographic technique that uses an atomic force microscope (AFM) to build a pattern on the substrate material rather than etching it away.
		In the same way that an old fashioned dip pen picks up ink from an ink well and is then used to write on paper, molecules are picked up from a reservoir on the end of the AFM tip and deposited to the surface of the substrate via a solvent or water.
	www.azonano.com /Details.asp?ArticleID=1736 (727 words)

	What is Nanolithography?
		Nanolithography is a term used to describe a number of techniques for creating incredibly small structures.
		This technique is a parallel method of nanolithography in which the entire surface is drawn on in a single moment.
		Funding for nanolithography research comes from a number of places, including the private academic world, futurist companies with an eye towards next-generation nanotechnology, and established computer chip manufacturers looking to shrink their chips far below their current sizes.
	www.wisegeek.com /what-is-nanolithography.htm (420 words)

	Nanolithography
		NRC scientists are using a cutting-edge nanolithography hot embosser (shown here) to create new biohazard detection and medical diagnosis technologies.
		Nanolithography involves imprinting 3D structures as small as 1/10,000 the thickness of a human hair onto a plastic wafer.
		This nanolithography research also has applications in the micro-electronics and optics industries.
	www.nrc-cnrc.gc.ca /multimedia/picture/manufacturing/nrc-imi_nanolithography_e.html (99 words)

	Nanotechnology - Engineering Section
		Nanolithography is the art and science of etching, writing, or printing at the microscopic level, where the dimensions of characters are on the order of nanometers (units of 10-9 meter, or millionths of a millimeter).
		Please note that there are other techniques used in nanolithography, which we will discuss in detail in the upcoming pages.
		Dip-Pen Nanolithography (DPN), which is based on a new (AFM) soft nanolithography technique, is a scanning probe nanopatterning technique in which an (AFM) tip is used to deliver molecules to a surface via a solvent meniscus, which naturally forms in the ambient atmosphere.
	www.personal.psu.edu /users/s/b/sbk142/nanolith.htm (205 words)

	Nanolithography and Manipulation Combined with Atomic Force Microscopy with The MFP-3D AFM and Micro
		Nanolithography and Manipulation Combined with Atomic Force Microscopy with The MFP-3D AFM and MicroAngelo from Asylum Research
		Nanolithography and manipulation capabilities have actually been around for quite some time.
		MicroAngelo can be used for many nanolithography and manipulation applications including surface scratching and patterning, localized surface oxidation, nanotube and particle manipulation, molecular manipulation, single molecule experiments and more.
	www.azom.com /Details.asp?ArticleID=3511 (1174 words)

	The MASS Group at UIUC > Research Summary: Nanolithography
		The nanolithography project is a focused effort to develop tools that can modify surfaces with nanoscale resolution in a massively parallel fashion.
		The core process we use for surface modification is known as dip pen nanolithography (DPN).
		In this process, a modified atomic force microscope probe is coated with a surface binding chemical that is to be deposited.
	mass.micro.uiuc.edu /research/current/nanolithography (794 words)

	Washington Technology Center - Nanolithography
		Nanolithography was identified through the Washington Nanotechnology Initiative as a critical process for Washington technology companies looking to introduce new products to market built on the foundation of nano-scale technologies.
		Nanolithography is a critical component in defense applications, but also has significant commercial value.
		Nanolithography is the technology that is driving this so called ‘top down’ demand.
	www.watechcenter.org /?p=Nanolithography&s=809 (506 words)

	NanoInk - DPN World - Journal Publications (Site not responding. Last check: 2007-10-22)
		Hyun, J; Kim, J; Craig, SL; Chilkoti, A: Enzymatic nanolithography of a self-assembled oligonucleotide monolayer on gold JACS 2004, 126 (15): 4770-4771.
		Sheehan, PE ; Whitman, LJ: Thiol Diffusion and the Role of Humidity in "Dip Pen Nanolithography" Phys.
		Jung, H; Kulkarni, R; Collier, CP: Dip-Pen Nanolithography of Reactive Alkoxysilanes on Glass JACS 2003, 125 (40): 12096-12097.
	www.nanoink-inc.com /5200_journalpubs.html (3071 words)

	Nanolithography
		Actually, there are several resources concerning lithography in general, and nanolithography in particular - but I liked the simplicity of this description and visuals...
		Lithography is the process by which a pattern (ex: for a transistor) is transferred from a “master” (the mask) to a wafer (which will become the chip) by shining light through the mask onto the wafer.
		As we gather more articles and up-to-date news on the field of nanolithography, these items will be added to this growing website.
	www.nanolithography.info (333 words)

	Nanoink Releases New Product: Bias Control Option For NSCRIPTOR
		This feature allows the researcher to perform oxidation nanolithography, so that they may selectively oxidize a semiconductor surface with insulating nanoscale patterns, and also enables the deposition of conductive nanoscale structures onto semiconductor surfaces via electrochemical DPN methods.
		The NSCRIPTOR instrument is a dedicated nanolithography system that patterns nanostructures by leveraging the extreme precision of scanning probe technology.
		The instrument is optimized for the Dip Pen Nanolithography process, in which a molecular “ink” is directly deposited from the probe tip (or “pen”) onto the substrate.
	www.semiconductoronline.com /content/news/article.asp?docid={4e4893f4-699e-4187-951c-f8ae2c77a5ac}&VNETCOOKIE=NO (448 words)

	CMS—Effect of Dissolution Kinetics on Feature Size in Dip-Pen Nanolithography (Site not responding. Last check: 2007-10-22)
		When a water meniscus forms between an AFM tip and a surface, it has a profound effect on tip-sample interactions, both degrading image quality and interfering with force measurements.
		However, this meniscus has been proposed as the crucial feature that enables the AFM tip to be used as a tool for controlled deposition of molecules on surfaces in dip-pen nanolithography (DPN).
		A recent study attempted to explain the dependence of DPN feature size on dwell time for mercaptohexadecanoic acid (MHA) by using a diffusion-controlled mechanism but failed to account for the dynamics of dissolution at the tip, a process that is fundamental to the rate of chemical transfer.
	www-cms.llnl.gov /s-t/nano-dip-pen.html (795 words)

	Dip Pen Nanolithography (Site not responding. Last check: 2007-10-22)
		Dip Pen Nanolithography (DPN) is a method developed at Northwestern University for depositing thin organic films in patterns with feature sizes of around 10 nm (about 20 times better than the best optical lithography).
		By coating an Atomic Force Microscope (AFM) tip with an ink, the scientists are able to deposit well defined lines of the ink in a manner similar to a traditional ink pen.
		However, this particular method for patterned film deposition can be operated in parallel because the deposition is independant of the applied force [1], making DPN a promising approach to nanolithography.
	www.nanoword.net /library/defgen/generate.php?termid=196 (169 words)

	Nanotechnology Spotlight: Native protein nanolithography that can write, read and erase
		While this sounds very promising for the future of diagnostic systems, with the promise of protein chips capable of single-molecule resolution, the controlled assembly of proteins into bioactive nanostructures still is a key challenge in nanobiotechnology.
		Tinazli is the first author of a recent paper in Nature Nanotechnology ("Native protein nanolithography that can write, read and erase") that describes a nanolithography technique that permits rapid writing, reading and erasing of protein arrays in a versatile manner.
		Developed by a group of researchers from the Cellular Biochemistry lab of Professor Robert Tampé at the Johann-Wolfgang-Goethe University of Frankfurt, and the Max-Planck-Institute of Biochemistry near Munich, the corresponding protein chip platform is suitable for any His-tagged proteins (an amino acid motif in proteins used to detect protein-protein interactions).
	www.nanowerk.com /spotlight/spotid=1713.php (938 words)

	X-Ray Nanolithography (Site not responding. Last check: 2007-10-22)
		For several years, we have been developing the tools and methods of x-ray nanolithography.
		A negative replica, or "daughter" mask is created by exposing with the mother mask using soft-contact x-ray nanolithography.
		Finally, the daughter mask is exposed onto the device substrate.
	nanoweb.mit.edu /annual-report00/04.html (519 words)

	Nanolithography System helps build nanoscale structures., NanoInk, Inc.
		The system hardware, optimized for nanolithography, leverages state-of-the-art scanning probe capabilities, robust industrial design and complete environmental control.
		NanoInk, Inc. develops and licenses Dip Pen Nanolithography, a platform process for nanoscale fabrication (in the region of 10 nanometers) using virtually any material.
		May 26, 2004 - Nanolithography System includes bias voltage control option.
	news.thomasnet.com /fullstory/22646 (723 words)

	SPM-based Nanotechnology (STM, AFM nanolithography, nanooxidation, nanopatterning)
		A decade ago the family of surface modification and patterning methods was enhanced with SPM-based nanotechnology, mainly represented by STM and AFM nanolithography [1456, 1457].
		Among various methods of fabrication of such devices AFM nanolithography provides much more perfect characteristics, in particular small lateral depletion lengths and high specularity of the scattering at the boundaries [1472].
		Common obstacles to be overcome in all nanolithography experiments as well as on the way to commercialization are wearing of SPM tip during the process and slow rates of writing.
	www.spmtips.com /bibliography/nanotechnology (4721 words)

	ISTC - Dry Nanolithography
		When applied to nanolithography the words wet and dirty are more terms than epithets.
		The basis of the method lies in new properties of fullerenes that have been detected by the scientists and the ability to control these properties, meaning their utilization as well – particularly in nanolithography.
		The fact is that carbon atoms, over and above the widely known crystalline structures of diamond and graphite, have the ability to line up in porous spheres that are comprised of several tens of atoms; so-called fullerenes.
	www.istc.ru /istc/sc.nsf/events/dry-nanolithography.htm (869 words)

	Dip-Pen Nanolithography
		Surface science in the Mirkin Group is primarily focused on the development and exploration of applications for Dip-Pen Nanolithography (DPN), the new AFM-based soft-lithography technique which was invented in our labs.
		Dip-Pen Nanolithography (DPN) is a scanning probe nanopatterning technique in which an AFM tip is used to deliver molecules to a surface via a solvent meniscus, which naturally forms in the ambient atmosphere.
		Lim, Jung-Hyurk; Mirkin, Chad A. "Electrostatically Driven Dip-Pen Nanolithography of Conducting Polymers," Adv.
	chemgroups.northwestern.edu /mirkingroup/dpn.htm (1708 words)

	Veeco News & Events (Site not responding. Last check: 2007-10-22)
		It leverages the unique capabilities of NanoInk's DPN process to pattern with novel materials and in configurations that were never before possible.
		"To bring exceptional nanolithography capabilities to the CP-Research platform, we were first looking for a package that made lithography tasks easy and customizable," explains Ken Babcock, General Manager at Veeco Metrology Group.
		Dip pen nanolithography ideally suits the strengths of our SPMs, because it uses molecular interactions to literally draw on surfaces.
	www.veeco.com /html/newsandevents_show.asp?PressID=473 (490 words)

	Surfactant boosts dip-pen nanolithography (October 2004) - News - nanotechweb.org
		The scientists found that adding a surfactant to the ink enabled them to pattern maleimide-linked biotin onto mercaptosilanized glass by dip-pen nanolithography.
		The researchers reckon the effect was due to the Tween-20 increasing the wettability of the ink on the mercaptosilanized glass surface.
		"Using dip-pen nanolithography for direct nanoscale patterning of biological materials such as DNA, peptides and proteins on oxidized silicon or glass substrates without loss of activity often requires the incorporation of an organic thin film as a specific binding template," said Collier.
	www.nanotechweb.org /articles/news/3/10/12/1 (401 words)

	Oxidation Nanolithography using the Bias Control Option of the NSCRIPTOR DPN System From NanoInk
		This process allows “ink” material to be directly deposited from a sharp pen tip onto a substrate with nanometer resolution and accuracy.
		In addition to doing DPN, this technology note shows that the NSCRIPTOR can be used for performing more general oxidation nanolithography without a coated tip.
		The ability to create an electric field at the tip with respect to the sample, and to have a current flowing through the tip-sample junction, opens another dimension to the versatility of the NSCRIPTOR system.
	www.azonano.com /Details.asp?ArticleID=1823 (763 words)

	Atomic Force Microscope-Assisted Electrostatic Nanolithography
		Since the polymer does not deteriorate during the formation of the feature, a subsequent application of heat will soften the entire film, enabling surface tension to erase the feature and reconstruct the initially uniform film.
		Current voltage-position feedback controls with these twodimensional tip arrays enable rapid access to both raised and recessed structures, providing for greater data storage logic based on relative deflections (positive, zero, negative) from the common plane.
		This AFMEN method represents a new paradigm for polymer nanolithography because it combines the localized softening and electrostatic manipulation of the polymer in a singlestep methodology using conventional AFM equipment.
	www.afrlhorizons.com /Briefs/Oct04/ML0323.html (563 words)

	Writing at the Nanoscale
		UPDATE: The Electro Pen Nanolithography technique is now described in a research article published in the October 29, 2005, online edition of the Journal of the American Chemical Society.
		The article details more fully the advantages of EPN, particularly its unique ability to deposit layers of "ink" with an integer number of molecular layers ranging from a single layer to several layers.
		Cai and his colleagues call the technique "Electro Pen Nanolithography" (EPN).
	www.bnl.gov /bnlweb/pubaf/pr/PR_display.asp?prID=05-76 (506 words)

	Washington Technology Center - Nanolithography
		The project is another significant step in the Washington Nanotechnology Initiative (WNI), a collaborative effort by Washington’s technology leaders to position our state as a global leader in the use of nanotechnology for next-generation product development.
		Nanolithography is a key component in defense applications and has significant commercial value.
		Nanotechnology-based products are estimated to generate $1 trillion in sales over the next decade. Many of Washington’s dominant and emerging industries, including life sciences, energy, manufacturing, electronics and agriculture, will directly benefit from nanolithography process development. Current technologies that rely on nanolithography include fuel cells, drug-delivery devices, microelectronics and photonics.
	www.watechcenter.org /?p=Nanolithography&s=851 (406 words)

	FuturePundit: Dip Pen Nanolithography Will Accelerate Biosciences
		The tool could allow researchers to study the behavior of cells at a new rate of speed and level of detail, potentially leading to better diagnostics and treatments for diseases such as cancer.
		The device builds on a technique called dip-pen nanolithography, which was first developed in 1999 by Chad Mirkin, professor of chemistry, medicine, and materials science and engineering at Northwestern University.
		In that system, the tip of a single atomic force microscope (AFM) probe is dipped in selected molecules, much as a quill pen would be dipped in ink.
	www.futurepundit.com /archives/003775.html (406 words)

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