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Topic: Pellicle


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In the News (Wed 9 Dec 09)

  
  Pellicle - Wikipedia, the free encyclopedia
The pellicle is a thick layer supporting the cell membrane in various protozoa, protecting them and allowing them to retain their shape.
In the same fashion, pellicle can also refer to the protective cover which can be applied to a photomask or reticle used by a stepper in semiconductor device fabrication.
A pellicle mirror is thin plastic membrane (often with an optical coating) which may be used as a beam splitter in optics and as a fixed mirror for single lens reflex cameras.
en.wikipedia.org /wiki/Pellicle   (213 words)

  
 United States Patent Application: 0040091796
The pellicle for lithography according to claim 1 wherein an area of the pellicle film is 1000 cm.sup.2 or more, and a distribution of a thickness of the film in plane is within.+-.10%.
Furthermore, the pellicle has a sticking layer for attaching the pellicle to an exposure original plate, made of a polybutene resin, a polyvinyl acetate resin, an acrylate resin, or the like and formed on another end face of the pellicle frame, and a reticle sticking layer protection liner for protecting the reticle sticking layer.
Two of the frames of the pellicle frame and the jig for producing of the pellicle were fixed with facing the adhesion side of the pellicle frame upward and attaching it to the jig for fixing, so that the position of the jig for fixing might not shift relatively.
appft1.uspto.gov /netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=/netahtml/PTO/srchnum.html&r=1&f=G&l=50&s1="20040091796".PGNR.&OS=DN/20040091796&RS=DN/20040091796   (4262 words)

  
 Method of manufacturing a pellicle - US Patent 6335126   (Site not responding. Last check: 2007-10-26)
The pellicle is a body consisting of an organic transparent thin film pasted on a specified frame, and the pasted thin film is generally called a pellicle film, and further, the specified frame on which the pellicle film is pasted is called a pellicle frame.
The pellicle manufacturing jig 7A is different from the pellicle manufacturing jig 7 in that the jig 7A uses a needle, instead of a blade, as the physical trimming means, the coating material is discharged from the root of the needle, and other matters relating thereto.
The pellicle manufacturing jig 7B is different from the pellicle manufacturing jig 7 in that, with the jig 7B, a pipe with its forward end being obliquely cut so as to have a shape like a syringe needle is used as the physical trimming means for discharging the coating material, and other matters relating thereto.
www.patentstorm.us /patents/6335126.html   (5864 words)

  
 Pellicle structure and process for preparation thereof with dissolution of coating layer - US Patent 5643654   (Site not responding. Last check: 2007-10-26)
A pellicle structure as set forth in claim 1, wherein the adhesive is a photocurable resin adhesive comprising 70 to 95% by weight of a base resin and 5 to 30% by weight of a monomer or oligomer capable of dissolving a fluorine resin coating layer therein.
A process for the preparation of a pellicle structure according to claim 4, wherein the adhesive is composed of a photocurable resin composition comprising 70 to 95% by weight of the base resin and 5 to 30% by weight of the monomer or oligomer capable of dissolving the fluorine resin coating layer therein.
In the pellicle structure 10 of the present invention, the pellicle film 12 is bonded to the frame 14 through an adhesive 20 capable of dissolving the first coating layer 16 and the second coating layer 18.
www.patentstorm.us /patents/5643654.html   (3837 words)

  
 Apparatus with four light detectors for checking surface of mask with pellicle - Patent 4889998
The pellicle is fixedly supported on the reticle by a supporting frame so that the pellicle covers the reticle leaving a space between the pellicle and a surface of the reticle, thereby preventing adhesion or sticking of the foreign particles on the reticle.
With respect to the scattered light from the foreign particle stuck to the upper surface of the pellicle 1, the output voltage from the photoelectric detector 47 is substantially the same as the output voltage from the photoelectric detector 48.
Further, when the surface of the pellicle 81 is checked by means of this apparatus, the locus to be scanned by the spot light of the laser beam is shifted onto the pellicle by lowering the reticle 82 by means of the stage (not shown) capable of moving in Z-direction.
www.freepatentsonline.com /4889998.html   (8656 words)

  
 MICRO: Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
The ellipsometry and transmission data from the pellicle membrane, shown in Figures 1 and 2, respectively, were fitted to an optical model of the pellicle to determine the pellicle's membrane thickness, roughness, thickness nonuniformity, and complex refractive index
The researchers have developed pellicle and frame adhesives for use in 157-nm pellicles with the required mechanical performance and low optical absorbances needed to minimize the impact of outgassing on the pellicle and photomask transmission.
This effect corresponded to the superposition of pellicles with varying thicknesses, in which the peak fringe transmission was reduced because an adjacent area of the membrane with a different thickness had a lower transmission and, therefore, a different wavelength for the fringe maxima.
www.micromagazine.com /archive/01/06/French.html   (3563 words)

  
 Newport Corporation | Optics | Beamsplitter |Pellicle Beamsplitter   (Site not responding. Last check: 2007-10-26)
Pellicle beamsplitters are ultra-thin, u ltra-lightweight components thatvirtually eliminate multiple reflections commonly associated with glass beamsplitters. We offer pellicle beamsplitters either coated for beamsplitting or uncoated for beam sampling.
Pellicles are manufactured by stretching a 5 µm thick polymer membrane over a flat metal frame.
Uncoated pellicles yield an average reflectivity of 8% from 375–2400 nm.
www.newport.com /pellicle%20beamsplitter   (157 words)

  
 United States Patent Application: 0040091788
The pellicle of claim 6 wherein said perfluoropoly-ether is cross-linked.
The pellicle of claim 6 wherein said cross-linked perfluoropoly-ether is formed from di-functionalized intermediates.
The pellicle of claim 6 wherein said di-functionalized intermediates include functional groups selected from the group including olefin, epoxide, oxetane, CH20H, COOH, and COOR, where R may be any moiety.
appft1.uspto.gov /netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=/netahtml/PTO/srchnum.html&r=1&f=G&l=50&s1="20040091788".PGNR.&OS=DN/20040091788&RS=DN/20040091788   (1039 words)

  
 Adjustable opto-acoustical low pass filter and technique - US Patent 6356379   (Site not responding. Last check: 2007-10-26)
At least one transducer is coupled with the pellicle and an AC electrical signal is applied to the transducer to establish waves in the pellicle.
Apparatus as defined by claim 2, wherein said pellicle is a pellicle beamsplitter and said light is also transmitted through said pellicle, and said pellicle is thin enough to avoid low-pass filtering of the image-representative information in the portion of the light transmitted through said pellicle.
Apparatus as defined by claim 1, wherein said pellicle is a pellicle beamsplitter and said light is also transmitted through said pellicle, and said pellicle is thin enough to avoid low-pass filtering of the image-representative information in the portion of the light transmitted through said pellicle.
www.patentstorm.us /patents/6356379.html   (2263 words)

  
 Pellicle
A thin plastic sheet mounted a short distance away from the surface of a reticule to insure that any microscopic dust that settles on the reticule will be out of focus during exposure and not create defects.
The pellicle is a thick, elastic, non-living layer that encloses all ciliates and some flagellates.
We are acquainted with a mere pellicle of the globe on which we live.
www.websters-online-dictionary.org /definition/Pellicle   (588 words)

  
 Microbiology of Dental Plaque   (Site not responding. Last check: 2007-10-26)
The pellicle is evident as lightly stained material on a tooth surface when patients use disclosing solution (Figure 4).
The pellicle is derived from salivary constituents which are selectively adsorbed onto the tooth surface.
Bacterial surface molecules interact with components of the dental pellicle to enable the bacteria to attach or adhere to the pellicle-coated tooth surface.
www.dent.ucla.edu /pic/members/microbio/mdphome.html   (1189 words)

  
 oe magazine - progress report: 157-nm lithography prepares to graduate   (Site not responding. Last check: 2007-10-26)
Pellicle non-flatness, which, due to gravity and mounting nonuniformity causes errors in feature placement, is expected to be solved.
The space between reticle and pellicle, itself held with a porous pellicle frame, is purged with nitrogen in a separate module, making it possible to achieve the required oxygen and water concentration levels of less than 1 ppm without affecting the overall tool productivity.
Operation without a pellicle is considered impractical because the cleanliness of the tool interior environment would have to be improved significantly, causing as much as a two-year delay in tool availability.
oemagazine.com /fromthemagazine/feb03/157.html   (3616 words)

  
 Frame-supported pellicle for photolithography - Patent 5597669
The advantages of the inventive frame-supported pellicle is obtained by the use of, in place of conventional cellulose-based polymers and fluorocarbon-based resins, a norbornene-based plastic resin as the material of the pellicle membrane spread over and adhesively bonded to one end surface of a rigid frame in a slack-free fashion.
The frame-supported pellicle for photolithography as claimed in claim 1 in which the degree of hydrogenation of the homopolymer of a norbornene compound or the copolymer of a monomer mixture mainly consisting of a norbornene compound is at least 99.0%.
The result of the air blow test was that the pellicle membrane could withstand the air blow at the air gun pressure of 2.0 kgf/cm.sup.2 but slackening of the pellicle membrane was noted at an air gun pressure of 2.5 kgf/cm.sup.2 and the pellicle membrane became broken at a pressure of 3.0 kgf/cm.sup.2.
www.freepatentsonline.com /5597669.html   (1176 words)

  
 Identification of in vivo Pellicle Constituents by Analysis of Serum Immune Responses -- Li et al. 83 (1): 60 -- ...   (Site not responding. Last check: 2007-10-26)
(Igs), statherin, and histatin 1 from mice immunized with pellicle,
To assess the composition of pellicle, we immunized 2 mice with
Microtiter plates were coated with pellicle proteins (10 µg/mL) or a series of purified protein standards (2 µg/mL) and subsequently incubated with 1:1000 diluted pre-immune serum (white bars) or 1:1000 diluted post-immune serum (fl bars).
jdr.iadrjournals.org /cgi/content/full/83/1/60   (2679 words)

  
 Herman Miller - for Education - Recent Press Releases
The new Pellicle designs for the Aeron seat-and-back suspension are visually lighter, more open weave designs that integrate easily with today's open business environments and new, lighter-scaled Herman Miller systems products, such as Resolve and the recent additions to the Ethospace line.
Pellicle Tuxedo has a more formal and dramatic look, yet is equally suited to contemporary interiors.
The colors chosen for the new Pellicle designs are simple neutrals that range from warm to cool, light to dark, and blend easily into a range of interior palettes.
www.hermanmiller.com /CDA/SSA/News/Story/0,1585,a18-c407-n249,00.html   (957 words)

  
 Statherin is an in vivo pellicle constituent: identification and immuno-quantification.   (Site not responding. Last check: 2007-10-26)
Statherin is an in vivo pellicle constituent: identification and immuno-quantification.
Statherin is an in vivo pellicle constituent: identification and immuno-quantification.This indicates that statherin represents the integral part of proteins that constitute the pellicle structure and may play a key role in its formation.
A strong positive correlation was observed between statherin and protein levels in pellicle but not in saliva indicating that statherin and protein adsorption to pellicle are related processes.
www.pdg.cnb.uam.es /UniPub/iHOP/gp/10310666.html   (167 words)

  
 Monoclonal antibodies against components of the acquired enamel pellicle   (Site not responding. Last check: 2007-10-26)
Objectives: The purpose of this study was to explore the protein components of in vivo formed pellicle by generating monoclonal antibodies (mAbs) against such pellicle constituents.
Pellicle materials were eluted from membranes using deionized water with vigorous vortexing followed by centrifugation.
Pellicle proteins recovered in the supernatants were measured by micro BCA.
iadr.confex.com /iadr/2002SanDiego/techprogram/abstract_19647.htm   (306 words)

  
 National Photocolor - Standard & Custom Pellicle Frames
Custom pellicles have been made from 1/16" I.D. to 16" I.D. In addition to circles and rectangles, ellipses and truncated cylinders (tubes cut off at an angle) are used for their ability to pass a circular beam at 45°
The flatness of the reflective surface is mainly dependent upon the flatness of the lapped area.
In use, flat pellicles must be installed carefully to prevent distortion of the frame.
www.nationalphotocolor.com /stan_cust.html   (296 words)

  
 PhotoNotes.org Dictionary - Pellicle mirror
Cameras with pellicle mirrors have fixed half-silvered mirrors that both direct light to the viewfinder and to the film surface.
Pellicle mirrors typically cost 2/3 stop of light and the viewfinder is also a bit dimmer.
A pellicle is a membrane or a thin film and refers in this case to the very thin reflective coating on the mirror.
photonotes.org /cgi-bin/entry.pl?id=Pelliclemirror   (386 words)

  
 Canon F-1 High Speed
Its fixed pellicle mirror allowed continuous viewing (without the typical SLR flout when the mirror goes up), and higher motor speeds up to 9 frames per second.
Nikon remedied the situation with its 9 fps F High Speed for the Montreal Olympics, with pellicle mirror.
Older pellicles, such as those in the Canon Pellix, have shown a tendency to yellow and separate.
www.cameraquest.com /f1high.htm   (578 words)

  
 Micro Lithography, Inc.
Recognizing that cleanliness is the most important quality in a pellicle, MLI is constantly developing and refining new methods to ensure that customers receive their pellicles in the cleanest state possible....
As the leading pellicle supplier in the world, MLI has the capability and capacity to meet the requirements of a variety of customers worldwide.
Founded in 1981, MLI is an innovator in the pellicle manufacturing industry and is the leading supplier of pellicles in the world.
www.mliusa.com   (97 words)

  
 Introduction to the Euglenoids
A cross-section through the cell shows how the pellicle is organized as a series of ridges and grooves.
The pellicle consists of the plasma membrane, a series of proteinaceous strips underneath the plasma membrane, and groups of microtubules associated with each strip.
The endoplasmic reticulum (ER) originates from the nuclear envelope, extends throughout the cytoplasm, and forms a large network at the periphery of the cell under the pellicle strips.
lifesci.rutgers.edu /~triemer/intro.htm   (297 words)

  
 [ D e t e r i o r a t e d A c e t a t e F i l m s ]
Next, the image pellicle (the removed emulsion layer) is cleaned and placed in a series of carefully controlled solutions, which allow its distortions to relax.
For institutions moving to digital access of their photograph collections, scanning is an appropriate preservation and access program, for the preserved pellicle is extremely stable and only requires a modest temperature and humidity environment to be considered archival.
Unless there were losses in the pellicle or unless significant silver migration occurred before the pellicle was released, the interpositive or digital file from an image pellicle is indistinguishable from that of a perfect, intact negative.
www.albumenworks.com /Detacetatefilms.html   (398 words)

  
 Voss electronic Pellicles and Pellicle-Mounting-tools   (Site not responding. Last check: 2007-10-26)
A pellicle is a photomask protective cover used in a projection printer, wafer stepper or scanner to optimize the product yield.
It is composed of a thin transparent membrane adhered to a metal frame which seals off a photomask or a reticle from harmful particle contamination.
As the leading pellicle supplier in the world, MLI has the capability and capacity to meet the requirements of virtually all customers worldwide.
www.vosselectronic.de /pellicle.htm   (107 words)

  
 Exchange of IR Mirror to Pellicle with FTS   (Site not responding. Last check: 2007-10-26)
Here is the procedure for exchanging the IR Pellicle for the IR mirror in the Cass.
The mirror is adjusted by loosening its retaining bolt and swivelling the mirror.
The pellicle tip is adjusted by turning the two tip/tilt screws on the pellicle mount.
www.cfht.hawaii.edu /~barrick/Telescope/CBMir2Pel.html   (401 words)

  
 Micromachined pellicle splitters and tunable laser modules incorporating same - usptntsrv
A micromachined pellicle beam splitter and method of manufacture thereof are disclosed.
Other materials may be utilized, however, the coefficient of thermal expansion (CTE) of the membrane should be greater than that of the frame.
An improved tunable laser module incorporating the micromachined pellicle beam splitter and a method of tuning a laser diode are also disclosed.
www.uspatentserver.com /685/6859330.html   (120 words)

  
 Theatre Solutions, Inc. - The Incomparable Theatre Seating Solution   (Site not responding. Last check: 2007-10-26)
Aeron is the only chair with Pellicle suspension, a unique material that conforms to the body and distributes weight evenly over the seat and back for a truly customized support.
Air circulates through the Pellicle to keep the occupant comfortable by preventing body heat build-up.
Pellicle suspension's lightweight and breathable design distributes the user's weight evenly over the seat and back of the chair.
www.theatresolutions.net /Aeron.htm   (200 words)

  
 Plaque & Calculus   (Site not responding. Last check: 2007-10-26)
The first stage is the formation of an organic dental pellicle, also known as the acquired or salivary pellicle.
Bacteria are not required for pellicle formation, but they adhere to and colonize it shortly after the pellicle is formed.
A group of protein molecules called adhesions located on the bacterial cell surfaces recognize and link to the pellicle glycoproteins promoting attachment of specific bacteria with the initial colonization of the pellicle, plaque is formed.
www.dent.ucla.edu /pic/members/plaque   (1472 words)

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