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| | Special Events - Microlithography 2004 - Program - Conferences - SPIE Web |
 | | As point tools in the design to silicon flow such as layout and physical design, place and route, timing optimization, resolution enhancement application, optical proximity correction, or mask fracturing, become more complex, integration of these tools with each other and with the required technology, process, and tooling information becomes increasingly difficult yet even more paramount. |
 | | Lithography was always a multidisciplinary technology, but immersion adds new dimensions to it, with its requirements on immersion fluid optical constants, polarization aspects of ultra-high NA and tight control of immersion fluid physical and chemical properties. |
 | | NIST Advanced Technology Program (ATP) provides cost shared funding to accelerate the development and broad dissemination of challenging, high-risk technologies that promise significant commercial payoffs and widespread economic benefits for the nation. |
| www.spie.org /Conferences/Programs/04/ml/specialevents (1391 words) |
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