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Topic: Rutherford backscattering

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		Rutherford backscattering spectrometry (RBS) detects the energies and amount of the backscattered ions from a solid target.
		The scattered He particles from the target are energy analyzed by a solid state particle detector (Si surface barrier detector) positioned at a backscattered angle with respect to the incident ion beam (typically ranging from 100-170 depending on the specific analysis).
		The energy of the backscattered He ions are dictated by conservation of energy and momentum between the incident ion and the scattering atom and can be related to the depth and mass of the target.
	www.lbl.gov /msd/Internal/Facilities/MSD_Ion_Beam.html (1041 words)

	Rutherford backscattering detection for use in Ion implantation - Patent 6255662 (Site not responding. Last check: 2007-11-03)
		A Rutherford backscattering detector for determining the angle of incidence between an ion beam and the crystalline lattice structure of a semiconductor workpiece.
		A Rutherford backscattering detector measures the intensity of backscattered particles and the backscattered ion intensity is correlated to an angle of incidence between the ion beam and the crystalline structure of the semiconductor workpiece.
		Backscattered ion intensity may be measured during set up for processing runs to verify that wafers 26 are properly oriented with the ion beam 24 as the cut of the wafer introduces variations in crystalline lattice structure alignment and the ion beam path drifts during processing.
	www.freepatentsonline.com /6255662.html (4156 words)

	Ernest Rutherford Bio from Thin Film Analysis (Site not responding. Last check: 2007-11-03)
		Rutherford's first researches, in New Zealand, were concerned with the magnetic properties of iron exposed to high-frequency oscillations, and his thesis was entitled Magnetization of Iron by High-Frequency Discharges.
		At Manchester, Rutherford continued his research on the properties of the radium emanation and of the alpha rays and, in conjunction with H. Geiger, a method of detecting a single alpha particle and counting the number emitted from radium was devised.
		Rutherford and Geiger calculated, on the assumption that the a-particle was a helium atom, that one gram of radium in equilibrium should produce a volume of 158 cubic millimeters of helium per year.
	www.tfainc.com /library.asp (6179 words)

	RBS Theory Introduction (Site not responding. Last check: 2007-11-03)
		Rutherford Backscattering (RBS) is based on collisions between atomic nuclei and derives its name from Lord Ernest Rutherford, who in 1911 was the first to present the concept of atoms having nuclei.
		It involves measuring the number and energy of ions in a beam which backscatter after colliding with atoms in the near-surface region of a sample at which the beam has been targeted.
		The number of backscattering events that occur from a given element in a sample depend upon two factors: the concentration of the element and the effective size of its nucleus.
	dwb.unl.edu /teacher/nsf/C04/C04Links/www.cea.com/cai/rbstheo/intro.htm (374 words)

	Cross-Section Data
		Available cross-sections for backscattering of protons from C are shown in Fig.
		Available cross-sections for backscattering of protons from N at 165° - 178° are shown in Fig.
		Backscattering of protons from Si at 160° - 170°
	www.rzg.mpg.de /~mam/CrossSection.html (1308 words)

	Rutherford scattering - Wikipedia, the free encyclopedia
		In physics, Rutherford scattering is a phenomenon that was explained by Ernest Rutherford in 1911, and led to the development of the orbital theory of the atom.
		Rutherford scattering is also sometimes referred to as Coulomb scattering because it relies on static electric (Coulomb) forces.
		From this, Rutherford concluded that the majority of the mass was concentrated in a minute, positively charged region (the nucleus) surrounded by electrons.
	en.wikipedia.org /wiki/Rutherford_scattering (480 words)

	clc9/15/02
		When Rutherford tried to use this model to understand the scattering of alpha particles from gold, he found that it was not possible to explain the large back angle scattering cross-section that was observed in the experiments.
		The physical process of Rutherford scattering is the deflection of of a charged particle, originally incident at a certain impact parameter b, by an angle q by the Coulomb interaction with a second charged particle.
		This small angle result is at the heart of the derivation of the expression for energy loss of charged particles moving in matter which you studied in the Particle Detectors laboratory, and can be readily derived by an impulse approximation treatment of Coulomb scattering.
	www.phys.ksu.edu /personal/cocke/classes/phys506/ruth.htm (1310 words)

	Rutherford Backscattering Spectroscopy (RBS) from Evans Analytical Group (EAG)
		Rutherford Backscattering Spectroscopy (RBS) is an ion scattering technique that is used for compositional thin film analysis.
		During an RBS measurement, high-energy (MeV) He++ ions are directed onto a sample and the energy distribution and yield of the backscattered He++ ions at a given angle is recorded.
		Since the backscattering cross section for each element is known, it is possible to obtain quantitative depth profiles from the RBS spectra (for thin films that are less than 1mm thick).
	www.eaglabs.com /techniques/analytical_techniques/rbs.php (232 words)

	Post Growth Characterization of Nitride Films - Rutherford Backscattering Spectroscopy (Site not responding. Last check: 2007-11-03)
		The second concept is the probability of backscattering from different elements, which is highly predictable and proportional to the square of the atomic number, allowing the determination of sample composition.
		The third concept is depth analysis, which is possible because backscattered ions are slowed due to inelastic energy losses before reaching the surface, which can conceptually be understood as "friction" and be treated as a continuous process.
		Rutherford backscattering (Ref. 49, U of M IBA) was performed on one GaN sample grown on a-plane sapphire as shown in Figure 43.
	members.aol.com /RudyHeld/dossier/dos114.htm (684 words)

	Rutherford Backscattering Spectrometry Investigation of the Permeability of Pyrolytically Coated Graphite Substrates (Site not responding. Last check: 2007-11-03)
		Rutherford Backscattering Spectrometry Investigation of the Permeability of Pyrolytically Coated Graphite Substrates
		Rutherford backscattering spectrometry (RBS) and scanning electron microscopy (SEM) were used to investigate the interactions of analytes with pyrolytically coated graphite which is typically used in graphite furnace atomic absorption spectrometry (GFAAS).
		Chemical species were found to migrate into the bulk of the graphite, up to depths of at least 3 micrometers, when deposited in a solution form on a nontreated or an oxygen-pretreated graphite flat.
	www.s-a-s.org /journal/97/asv51n2/ASv51n2_sp12.html (169 words)

	MIJ-NSR Volume 1, Article 40 (Site not responding. Last check: 2007-11-03)
		Rutherford back scattering is performed with 2.0 MeV He ions at a scattering angle of 170°.
		In the case of the MOVPE sample, the backscattering contribution of N is superimposed on the Al and O contribution of the substrate below channel 400.
		In the case of the GSMBE sample, the backscattering contribution of the substrate cannot be detected because of the large layer thickness.
	nsr.mij.mrs.org /1/40/complete.utf.html (2331 words)

	materials science 01
		The experimental in-depth nickel distribution, as measured by Rutherford backscattering spectrometry is reported in Fig.
		The peaks are both shifted of about 350 Å towards the surface with respect to the positions in the simulation, because of the surface erosion effect of the incident ion beam during the sample preparation.
		This result is in agreement with the Rutherford backscattering spectrometry measurements shown on the left side of Fig.
	www.ill.fr /AR-99/page/54materials.htm (959 words)

	The Rutherford Experiment (Site not responding. Last check: 2007-11-03)
		Rutherford expected all of the particles to be deflected just a bit as they passed through the plum pudding.
		Rutherford’s result lead him to believe that most of the foil was made of empty space, but had extremely small, dense lumps of matter inside.
		To understand some of the ways that ions are used to probe solids, we consider an important technique used in crystallography: Rutherford Backscattering.
	www.physics.rutgers.edu /meis/Rutherford.htm (431 words)

	Rutherford Backscattering
		Rutherford backscattering spectrometry (RBS) and ion channeling are well established techniques for thin film analysis and require precise positioning of the sample with respect to the incoming ion beam and detector.
		We built a new, extremely precise and rigid eucentric goniometer with three perpendicular rotation axes and a x/y-translation stage capable of handling whole wafers up to 150 mm diameter.
		The goniometer, which includes also a motor-driven stage for the backscattering detector was mounted in a UHV-chambe and installed at the Jülich 1.7 MV Tandetron accelerator.
	www.fz-juelich.de /zel/zel_gormet_e (408 words)

	Lecture 5: CHEM 1251-005/006, F05 (Site not responding. Last check: 2007-11-03)
		This model was rejected, not because it had a silly name, but because it was refuted (proved wrong) in an astonishing experiment performed by Ernest Rutherford in 1910.
		Note that the scale of Figure 2.11 is way off: if the atom were the size of a football stadium, then the nucleus would be about the size of a marble.
		Rutherford did not yet know that the nucleus itself was composed of smaller particles until later:
	www.chem.uncc.edu /1251/cooper/Lecture05.htm (683 words)

	Terrestrial (Site not responding. Last check: 2007-11-03)
		From this information it is straightforward to extract the charge and scattering angle of the backscattered particle; the energy loss provides additional particle identification information.
		From a knowledge of the Rutherford cross section and the scattering angle, it is possible to determine the mass of the struck target particle.
		The increase in sensitivity with mass corresponds to an increase in the Rutherford cross section.
	www.physics.rutgers.edu /~jholden/strange/node20.html (418 words)

	rutherford backscattering
		The shapes seen in this map correspond to the hexagons seen in the photographs.
		(b) Comparison of backscattered spectra obtained with the sample in random and channeled orientations, taken from the smooth (ie: hexagon free) regions of the film.
		By fitting a simulation to these spectra, film thickness was determined to be 0.23mm.
	www.ph.unimelb.edu.au /~drb/ainse97/sld008.htm (63 words)

	Michigan Ion Beam Lab
		Ion beam analysis capabilities include Rutherford backscattering spectrometry (RBS), ion channeling, nuclear reaction analysis (NRA) and elastic recoil detection (ERD).
		Rutherford backscattering spectrometry is used to determine the composition profile of the surface to depths of up to one micron and with a resolution of better than 10 nm.
		The technique provides a determination of the surface composition vs. depth profile and the number of atoms per unit area in the target.
	www.engin.umich.edu /research/mibl/capabilities.html (580 words)

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