| |
| | Integrated SAWs using GaAs |
 | | SAW devices consist of a piezoelectric substrate, typically quartz, and two interdigitated transducers formed by photolithographic patterning of a thin metal layer. |
 | | The velocity and attenuation of the propagating wave are very sensitive to properties, such as mass and viscoelasticity, of thin films formed on the device surface. |
 | | Quartz, the typical substrate for SAW sensors, is not a semiconductor while Si, the typical semiconductor used for microelectronics, is not piezoelectric and requires piezoelectric film deposition to enable SAW excitation. |
| www.sandia.gov /mstc/technologies/microsensors/sawgaas.html (624 words) |
|