| |
| | Termal decomposition of Silane |
 | | Temperature [3,6], different amounts of silane in the gas-mix [3,5] and particle size in fluidized bed reactors have been used as variation parameters in order to optimize the decomposition of silane to produce SOG-Si. |
 | | Temperature [3,6], gas-mixing with different amounts of silane [3,5,7] and particle size in fluidized bed reactors [8] have all been studied as variation parameters in order to optimize the decomposition of silane. |
 | | The possibility of producing silane gas from solid silicon and hydrogen gas at high pressure will be studied as a non-chlorine route to make silane (figure 2). |
| energiparken.hia.no /silisiumdoktor.htm (654 words) |
|