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Silicon-on-insulator optical waveguide Michelson interferometer sensor for temperature monitoring - Patent 6603559 |
 | | Silicon is very easy to acquire and very cheap, and has been the major material in the IC manufacturing process, so the present invention uses silicon-on-insulator as the substrate. |
 | | Silicon-on-insulator waveguide Bragg grating 2 comprises an amorphous silicon layer 21, a sinusoidal silicon grating layer 22, a silicon dioxide insulating layer 16 and a silicon substrate 17, as shown in FIG. |
 | | By the couple-mode equation, the present invention designed an optimal silicon-on-insulator waveguide Bragg grating having waveguide width 11 of 6.mu.m, sinusoidal silicon grating layer 22 of 1.5.mu.m, grating period 23 of 0.2215.mu.m, grating length 24 of 100.mu.m, silicon dioxide insulation layer 16 of 0.4.mu.m, and amorphous silicon layer 21 of 1.mu.m. |
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