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Topic: Silicon oxide, di


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In the News (Sat 26 Dec 09)

  
  SILICON - LoveToKnow Article on SILICON   (Site not responding. Last check: 2007-10-20)
Silicon hydride, SiH4, is obtained in an impure condition, as a spontaneously inflammable gas, by decomposing magnesium silicide with hydrochloric acid, or by the direct union of silicon and hydrogen in the electric arc.
The organic derivatives of silicon resemble the corresponding carbon compounds except in so far that the silicon atom is not capable of combining with itself to form a complex chain in the same manner as the carbon atom, the limit at present being a chain of three silicon atoms.
Silicon teiraphenyl, Si(C1H1)4, a solid melting at 231 C., is obtained by the action of chlorobenzene on silicon tetrachioride in the presence of sodium.
8.1911encyclopedia.org /S/SI/SILICON.htm   (2341 words)

  
 United States Patent: 6,738,240   (Site not responding. Last check: 2007-10-20)
The microtransformer of the present invention uses a silicon substrate with a pair of through-holes on which an insulating silicon oxide layer is first deposited on all surfaces of the substrate.
Oxide layer 44 can be formed over the entire top and bottom surfaces of the substrate 40 and then etched to only remain on these surfaces in the area between holes 43 and 45 and on the side walls shown as CDGH and ABEF in FIG.
Oxide layer 44 is approximately 1.mu.m thick and is a first insulating layer, which also acts as a substrate passivation layer.
web.engr.oregonstate.edu /~flf/6738240.html   (6002 words)

  
 Chapter 7: Thinning Procedures
The silicon is removed from the device wafer by a grind wheel with diamond or silica particles to the total thickness which is the sum of the device layer thickness and the handle wafer thickness.
Since the oxidation of lightly doped silicon is much slower than that of heavily doped silicon, the rate determining step in the etching of lightly doped silicon by the 1-3-8 etch appears to be the oxidation while in heavily doped silicon the rate determining step becomes the HF diffusion which is fast (7.18).
Thinning of entire silicon wafers of bonded pairs for device layers in submicron thickness with a variation less than 10% is usually achieved by a layer transfer approach in which a predetermined thin and uniform silicon layer on a silicon device wafer is transferred onto a desired substrate (handle wafer).
www.duke.edu /web/wbl/ch7/ch7-hpge.html   (6667 words)

  
 Characterization of silicon surface preparation processes for advanced gate dielectrics
However, recent studies suggest that the quality of the native oxides is strongly dependent on the applied chemistry in which they are formed, and that higher-quality oxides can be obtained with alternate chemistries such as DI water/ozone [15-18].
Unlike thermally grown oxides, which have been characterized quite extensively because of their technological significance, wet-chemical oxides are not very well understood; more thorough investigations have recently been undertaken [17, 18].
Wet-chemically grown oxides are generally covered with surface hydroxyl groups (Si-OH) called silanol groups, and are very similar in their behavior with respect to silica gels, which are used for metal adsorption (ion exchange resins), as a substrate for catalysts, and for other applications [19].
www.research.ibm.com /journal/rd/433/okorn.html   (7544 words)

  
 Method for forming low compressive stress fluorinated ozone/TEOS oxide film - US Patent 6121164   (Site not responding. Last check: 2007-10-20)
Silicon oxide is widely used as an insulating layer, such as an IMD layer, in the manufacture of semiconductor devices.
With the present invention, a halogen-doped silicon oxide film having properties suitable for use in modern IMD applications may be provided that also has a minimized film thickness in comparison with conventional thick composite films discussed earlier.
The thickness of the halogen-doped silicon oxide film used for an IMD layer depends on the height of the structures forming the gap to be filled.
www.patentstorm.us /patents/6121164.html   (8905 words)

  
 Silicon Dioxide
Native silicon dioxide is a high-quality electrical insulator and can be used as a barrier material during impurity implants or diffusion, for electrical isolation of semiconductor devices, as a component in MOS transistors, or as an interlayer dielectric in multilevel metallization structures such as multichip modules.
The ability to form a native oxide was one of the primary processing considerations which led to silicon becoming the dominant semiconductor material used in integrated circuits today.
Thermal oxidation of silicon is easily achieved by heating the substrate to temperatures typically in the range of 900-1200 degrees C. The atmosphere in the furnace where oxidation takes place can either contain pure oxygen or water vapor.
www.ece.gatech.edu /research/labs/vc/theory/oxide.html   (733 words)

  
 X-bit labs - Articles - Memory Manufacturing: Under a Veil of Secrecy
Silicon oxide, which is none other but a common glass, is a di-electric, i.e.
This layer is formed by exposing the silicon wafer to oxygen in a special oven at temperatures of 900 degrees C or higher (this extremely high temperature allows to speed up the oxidation of the silicon wafer surface).
As is known, silicon is a semiconductor, however, different dopants integrated into the silicon lattice allow to locally change its conductive characteristics of n- and p-type (that is the conductivity of negative and positive charges).
www.xbitlabs.com /articles/memory/display/micron-tour.html   (3639 words)

  
 [No title]   (Site not responding. Last check: 2007-10-20)
Silicon wafers, as shipped from the manufacturer, have a native oxide layer ~30-50 Å thick.
Silicon wafers were placed in a cleaned PTFE chamber containing HF vapor, with an exposure time of 30 min.
The successful recovery of the spikes in 100 ppm silicon indicates that the use of higher plasma power (930 W) and matrix-matched standards are effective in overcoming the physical interferences associated with this type of sample.
www.reed-electronics.com /semiconductor/index.asp?layout=articlePrint&articleID=CA92546   (2344 words)

  
 Silicon Information
Perhaps one of the most important uses for Silicon in the second half of the twentieth century and beyond, is it's ability to conduct electricity in a very controlled manner.
In theory pure monocrystalline Silicon will not conduct electricity very well at all, the beauty of Silicon is that it can be made to take on dopants precisely and after this doping it will normally remain stable under many adverse conditions.
The surface tension between the seed and the molten Silicon causes a small amount to rise with the seed, as it is pulled and cooled into a perfect monocystalline ingot with the same crystal orientation as the seed.
www.processpecialties.com /siliconp.htm   (2787 words)

  
 Surface treatment of semiconductor substrates - Patent 4050954
Analysis indicates that this is accomplished by alteration of the nature of the bonding of the oxide, which appears to be as follows: ##STR1## Such conversion of the wafer surface to a hydrophilic state can be obtained by the use of oxidizing agents, alkali metal hypohalites and the dichromate and permanganate in sulfuric acid.
These oxidizing agents not only convert the silicon surface to hydrophilic form but can also coagulate colloidal silica (when used as the polishing medium) which can then be removed by mere water rinsing.
Also, as is known, electrochemical equillibrium calculations of Si/H.sub.2 O systems show that silicon is an extremely strong reducing agent, whereby in the presence of strong oxidizing agents, such as sodium hypochlorite, the silicon surface is also oxidized.
www.freepatentsonline.com /4050954.html   (1856 words)

  
 Portland cement -- Facts, Info, and Encyclopedia article   (Site not responding. Last check: 2007-10-20)
Portland cement is the most common type of (Something that hardens to act as adhesive material) cement in general usage, as it is a basic ingredient of (A strong hard building material composed of sand and gravel and cement and water) concrete and (Used as a bond in masonry or for covering a wall) mortar.
The resulting material is (A hard brick used as a paving stone) clinker, and can be stored for a number of years before use, prolonged exposure to water decreases the (Ready susceptibility to chemical change) reactivity of cement produced from weathered clinker.
The finished cement has approximately the following composition: calcium oxide 64%, aluminum oxide 5.5%, silicon oxide 21%, ferric oxide 4.5%, magnesium oxide 2.4%, sulfate 1.6%, with a loss of ignition about 1% (mostly water).
www.absoluteastronomy.com /encyclopedia/p/po/portland_cement.htm   (1008 words)

  
 [No title]   (Site not responding. Last check: 2007-10-20)
Traps in Silicon Di oxide There are various trap states present in oxide layer.
This oxide leakage occurs before destructive breakdown and hence is the main reason for failure in oxides.
Small quantity of interface states Hole oxide traps Electron oxide traps When a device damaged due to creation of hole oxide traps is subjected to electron injection, the positive holes are neutralized and electron traps are filled up.
www.csee.wvu.edu /classes/ee25/paper1.doc   (1461 words)

  
 Thermal Oxide Information
It is normally found on a device as "field oxide" electrically isolating Polysilicon, metal or other conductive thin film(s) from the Silicon substrate or "bulk" of the device.
It is also found on the device as a "gate oxide," this is a very thin thermal oxide located over the gate or active region of the individual transistors.
For this reason dry oxides normally do not exceed 1000Å in thickness and are primarily used for thin gate and capacitor oxides where high uniformity and high dielectric strength are needed.
www.processpecialties.com /thermox.htm   (1002 words)

  
 SBF Glossary: .si to Six Sigma
Metal silicides are compounds in which silicon typically bonds as an anion (nonmetal).
Given that silicon and oxygen are the two most common elements on the earth's crust, it is not surprising that silicon dioxide--quartz in its igneous form--is very common.
silicon is polycrystalline because it is deposited over an oxide layer.
www.plexoft.com /SBF/S06.html   (5261 words)

  
 Kulite - Leader in Pressure Transducer Technology : Technology
This layer provides dielectric isolation between the N-type silicon and the P-type silicon of the layer containing the Wheatstone bridge circuit, thus eliminating P-N junctions from the design of the device.
The third layer is fusion bonded to the layer of silicon dioxide, at the intermolecular level, through a proprietary, high-temperature process.
The individual elements of this circuit are isolated from one another by a field mask of silicon dioxide, which is a continuation of the layer of silicon dioxide separating the layer of N-type silicon from the layer of P-type silicon.
www.kulite.com /techsensor.asp   (575 words)

  
 Adhesion properties on nanometric scale of silicon oxide and silicon nitride surfaces modified by 1   (Site not responding. Last check: 2007-10-20)
Adhesion properties on nanometric scale of silicon oxide and silicon nitride surfaces modified by 1
Silicon oxide and silicon nitride surfaces have been treated with 1-octadecene at about 200 °C. The resulting film topography has been inspected by Atomic Force Microscopy (AFM) showing a densely packed organic coating with a corrugation of some tenths of a nanometer.
Furthermore, peaks diagnostic of the formation of SiOC or SiC linkages are observed in the case of silicon oxide, while the same peaks and the ones due to SiNC species have been observed in the case of silicon nitride.
www.unict.it /dipchi/lamsun/adhespro.htm   (189 words)

  
 Home   (Site not responding. Last check: 2007-10-20)
In occupational lung diseases, the inhaled particles produce a variety of reactions in the respiratory tract which depend upon the nature of the inhaled matter; the size, shape and concentration of the particles, the degree and duration of exposure, the site of the reaction and the individual workers susceptibility (Campbell and Schonell, 1984).
The compounds present in cements are formed by the interaction during burning or the lime, silica, alumina and ferric oxide compounds, which constitute the bulk of the raw mix, together with the various minor components, such as magnesia and the alkalis which are also present.
The port land cement is composed of calcium oxide (CaO), magnesium oxide (MgO), silicon di oxide (SiO2), calcium hydro oxide (Ca (OH)2) aluminum oxide (Al2O3), ferric oxide (Fe2O3).
azenmu.freeservers.com   (3513 words)

  
 The SUPREM-IV.GS Models Command
This parameter specifies the oxide - silicon interface injection is to be computed using the oxide growth velocity and with 1% of consumed silicon injected as interstitials.
This specifies that the surface recombination velocity at the nitride silicon interface is 3.5E-3 cm/sec.
Many of the parameters have unknown dependencies on stress, temperature, starting silicon material, stacking fault density, etc. High concentration phosphorus diffusion is promising with these models, but the coefficients have not been extracted to allow good fits to experiment.
www-tcad.stanford.edu /tcad/programs/suprem-IV.GS/Book/Users_Man_Models/Interstitial.html   (1386 words)

  
 [No title]
If a bias voltage is applied to the Gate metal, relative to the silicon substrate, in excess of the Threshold Voltage, Vt, then charge carriers are gethered in sufficient concentration under the Gate oxide.
For example, if the substrate is p-type silicon, then electrons are the channel charge; for n-type silicon substrate, it is the holes.
The Threshold voltage of a MOS structure depends on the physical properties of the MOS structure such as the kind of Gate metal, oxide thickness, and silicon doping level.
jas.eng.buffalo.edu /education/mos/mosfet/mosfet.html   (1508 words)

  
 IBM Journal of Research and Development: Characterization of silicon surface preparation processes for advanced gate ...
The etching behavior of an ultrathin thermally grown silicon oxide layer in hydrofluoric acid (HF) is discussed as a new result obtained using the OCP technique.
The thickness of this SiO^sub 2^ layer is between 0.6 and 2.0 nm, its nominal value depending on oxidation conditions and the measurement techniques used.
This chemical oxide (often referred to as "native" oxide) forms a passivation layer with a danglingbond defect density in the range of 10^sup 12^ cm^sup 2^ at the Si/SiO^sub 2^ interface [13, 14].
www.findarticles.com /p/articles/mi_qa3751/is_199905/ai_n8839760   (1411 words)

  
 The SUPREM-IV.GS Models Command
Dix.0 defaults to 0.28 cm2/sec in silicon, and Dix.E defaults to 3.46 eV in silicon [3].
Dip.0 defaults to 0.23 cm2/sec in silicon, and Dip.E defaults to 3.46 eV in silicon [3].
The silicon concentration will be half the oxide concentration in equilibrium at 1100C.
www-tcad.stanford.edu /tcad/programs/suprem-IV.GS/Book/Users_Man_Models/Boron.html   (498 words)

  
 Laboratory Experiment Three
Photolithography is the process of transferring a pattern from a photomask onto the surface of a silicon wafer or substrate.
Finally, the pattern is transferred to the underlying material (typically a silicon dioxide layer) by means of a wet or dry etching process.
Using the oxide thickness obtained in the last experiment, estimate the etch time required to etch completely through the silicon dioxide layer.
mitghmr.spd.louisville.edu /course99/exp399.html   (811 words)

  
 STAR CEMENT - WHAT IT TAKES TO BUILD THE FUTURE   (Site not responding. Last check: 2007-10-20)
Limestone (Calcium Carbonate) and other material containing appropriate proportions of Calcium, silicon, aluminium and iron oxides are crushed and milled to a fine flour like stuff called “Raw Meal“.
This is preheated in a pre heater or in A rotary kiln to dis-associate calcium carbonate to active calcium oxide with The evolution of carbon dioxide and then to react calcium oxides with Other component in a Rotary Kiln to form calcium silicates and aluminates Which partially fuse at material burning temp up to 1400
Soundness provides an index of potential delayed expansion caused by Hydration of Calcium Oxide, or Magnesium Oxide, or both when present in Portland Cement.
www.starcement.net /frz/bin/faq.html   (2037 words)

  
 Journal of Electronic Materials: Post-CMP cleaning using acoustic streaming   (Site not responding. Last check: 2007-10-20)
Basic chemistry has been used to remove silica, alumina, glass, PSL, and silicon nitride particles.616 The basic chemistry is used mainly to increase the repulsive charge (zeta potential) between the particle and the substrate.
At the pH of water, a silicon surface with a native oxide has a negative zeta potential (the pzc for a hydrophilic silicon substrate is approximately 2.6).25 Thus, negatively charged particles will be repulsed from a hydrophilic substrate at this pH, and even more strongly at higher pH.
In deionized water, silica and PSL particles are both negatively charged, whereas alumina and silicon nitride particles typically carry a positive charge.27 Thus, silica and PSL will be repelled from a wafer surface in water while silicon nitride will be attracted.
www.findarticles.com /p/articles/mi_qa3776/is_199810/ai_n8812919   (1159 words)

  
 Nat' Academies Press, Research Briefings 1987 (1988)
A tiny seed crystal of silicon with the proper crystalline orientation is inserted into the melt and slowly rotated and withdrawn at a precisely controlled rate, forming a large (15 cm x I.3 m) cylindrical single crystalwith the desired crystalline orientation and com- position.
The pol- ishecl silicon wafer is first oxidized in a fur- nace at 1000-1200°C. The resultant silicon di- oxide film is a few hundred nanometers thick and extremely uniform.
The higher index core is procluced by doping sil 29 ice with oxides of phosphorus, germanium, and/or aluminum.
www.nap.edu /books/0309038286/html/25.html   (6603 words)

  
 Silicon Oxide Etch   (Site not responding. Last check: 2007-10-20)
Purpose: To remove the areas of silicon dioxide unprotected by photoresist and thereby expose the silicon underneath.
If the silicon dioxide has not been completely etched away, you will observe a film of the solution adhering to the whole surface of the wafer.
As a final check, view the etched areas of the wafer under the microscope, you should not see oxide, which has colors, but instead silicon, which appears rather white under a high-power microscope with vertically incident white light.
mitghmr.spd.louisville.edu /sops/sop21.html   (479 words)

  
 Untitled Document
Cracking is the process of breaking up a higher hydrocarbon into smaller saturated and unsaturated hydrocarbon molecules by heat or a catalyst.
Carbon mono Oxide on inhalation mixes with haemoglobin to form carboxy haemoglobin, which reduces the oxygen carrying capacity causing suffocation and even death.
Silicon is placed in group IV of the periodic table and can be obtained from silicon di oxide (SiO2).
www.classteacher.com /student/exambooster/concepts/chemistry10.html   (1254 words)

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