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| | Michigan Nanofabrication Facility |
 | | The Michigan Nanofabrication Facility (MNF) at the University of Michigan Solid-State Electronics Laboratory (SSEL) |
 | | The MNF builds on its experience in integration of Si-based electronics with MEMS transducers and micropackaging to push these interfaces into the nanometer regime with emphasis on the fabrication, packaging, and testing of integrated devices for chemical and biological sensing, electrical stimulation of biological systems, and integrated fluidic systems. |
 | | Research is focused on the theory, design, and fabrication of electronic, optoelectronic, and micromachined devices, circuits, and microsystems, as well as on novel characterization and metrology techniques. |
| www.nnin.org /nnin_michigan.html (365 words) |
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