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Topic: Surface metrology

In the News (Tue 2 Dec 08)

Damian Green

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Tommy Tuberville

Bill Clinton

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Wake Forest

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Oklahoma State

	Surface Metrology Guide - Surfaces and Profiles (Site not responding. Last check: 2007-11-01)
		Surface geometry and geometric dimensioning and tolerancing are large subfields of metrology which parallel or exceed surface finish in scope and complexity.
		Surface texture is the combination of fairly short wavelength deviations of a surface from the nominal surface.
		A filter (for purposes of surface finish measurement) is an electronic, mechanical, optical, or mathematical transformation of a profile to attenuate (remove) wavelength components of the surface outside the range of interest for a measurement.
	www.predev.com /smg/intro.htm (2223 words)

	Roughness - Wikipedia, the free encyclopedia
		Roughness or rugosity is a measurement (see surface metrology) of the small-scale variations in the height of a physical surface.
		Roughness is sometimes an undesirable property, as it causes friction, wear, drag and fatigue, but it is sometimes beneficial, as it allows surfaces to trap lubricants and prevents them from welding together.
		The average height of the bumps on a surface, measured in micrometres or microinches.
	en.wikipedia.org /wiki/Roughness (206 words)

	Metrology in Global equipment directory. Page 1 (Site not responding. Last check: 2007-11-01)
		Metrology is variously described as the science of measurement; the science of accuracy and...
		Metrology is the science of measurement of objects at all scales.
		Metrology is the field of knowledge concerned with measurement, and includes all aspects both...
	www.aledir.com /Metrology (208 words)

	WPI Surface Metrology Laboratory - Welcome (Site not responding. Last check: 2007-11-01)
		Surface Metrology is the study of surface geometry, also called surface texture or surface roughness.
		Quantitatively the objective in surface metrology is to be able to use texture measurements and analysis to differentiate and correlate surfaces with different behavior or histories.
		The scale of interest in surface metrology depends on the application, and is generally in the nanometer to micrometer range.
	www.me.wpi.edu /Research/SurfMet (862 words)

	GBT Laser Metrology: A Review and Bibliography
		The evolution of the laser metrology design is documented in a number of early GBT Memos [3, 4, 5, 8, 11, 12, 13, 14, 15, 16, 17].
		The surface measurements would be relative measurements to bring the surface back into agreement with a calibration measurement derived from holography measurements [22], and the structural information would be used to correct the differential motions due to thermal drift and to improve the finite element analysis model.
		The basic metrology architecture is composed of two systems---instruments mounted on the arm which measure 2209 points on the surface, and instruments on the ground that tie cardinal points on the structure (including the instruments on the arm) to the ground---and thus a fixed earth-based coordinate system [42].
	www.gb.nrao.edu /~rcreager/GBTMetrology/documentation/gbtmemo/gbtmemo166.html (11875 words)

	oe magazine - Taking Optical Precision to the Extreme (Site not responding. Last check: 2007-11-01)
		Ideally the PSD plots from the various metrology instruments overlap to permit seamless stitching of instrument data into a single composite curve from which we obtain the surface error values by numerical integration (see figure 3).
		ASML Optics is also applying these standards, fabrication and metrology technologies to the wavefront correction of large-field optics that may potentially be used in a leading space agency program to secure images of planets orbiting nearby stars, exploring a method for producing such large-aperture, high-performance systems rapidly and economically.
		Metrology data showed the parabolic mirror wavefront error was dominated by spherical aberration before special figuring, and by 3-50 cycles/aperture error after special figuring (see figure 6).
	oemagazine.com /fromTheMagazine/nov04/uvoptics.html (1540 words)

	TIC-MS - Glossary of Terms
		Circularity- The condition on a surface of revolution (cylinder, cone, or sphere) where the points of the surface are intersected by any plane perpendicular to a common axis (cylinder, cone) or passing through a common center (sphere) equidistant from the center.
		Cylindricity- A condition of a surface of revolution in which all points of the surface are equidistant from a common axis.
		Metrology Laboratory- A metrology laboratory is a laboratory for the calibration of standards.
	www.ticms.com /wizard/glossary.htm (8785 words)

	metrology surface in Metrology at Coderdir.com. Page 1 (Site not responding. Last check: 2007-11-01)
		Surface metrology is the science of measuring small-scale features on surfaces, and is related to Metrology.
		The shape and extent of a nominal surface are usually shown...
		Metrology profilometer for surface roughness measurment, the Ambios XP is a precision tool and tester offering metrology calibration instrumentation for height measurement, ra surface finish flatness, rms surface finish and rz surface finish...
	www.coderdir.com /Metrology/metrology%20surface (255 words)

	NIST - Internet-based Surface Metrology Algorithm Testing System (Site not responding. Last check: 2007-11-01)
		Surface measurement instruments, such as stylus profilers and optical profilers, are used to characterize the roughness of surfaces.
		The calculations of certain surface parameters of the NIST SMATS have been validated based on a surface parameter algorithm round-robin, which was previously conducted by the American Society of Mechanical Engineers Committee B46 on the Classification and Designation of Surface Qualities to ascertain the relative agreement between various surface metrology software packages.
		Surface parameters for waviness, roughness, and primary profiles may be calculated after a profile is filtered.
	ats.nist.gov /VSC/jsp/About.jsp (933 words)

	MSERC - The Department of Engineering - Faculty of Engineering - University of Liverpool
		The most advanced surface metrology system available, the NT3300 rapidly measures heights from 0.1 nm to several millimeters, with vertical resolution as low as 0.1 nm.
		For advanced materials, precision surfaces, MEMS, semiconductor packaging, films, optics, and many more applications, the Wyko NT3300 is the new tool of choice for accurate surface metrology.
		Applications include large area surface roughness measurement, non-contact component measurement, turbine blade damage, gear wear, paper surface roughness measurement, profiling of skin, leather and other textures and any application which requires large area, non-contact height measurement.
	mserc.liv.ac.uk /facilities/metrology/index_html (413 words)

	Scatter measurements of silicon wafer surface features (Site not responding. Last check: 2007-11-01)
		Scatter metrology is important in the semiconductor industry where decreasing line widths make the detection of ever smaller defects mandatory.
		If the feature in question is uniformly distributed across the illuminated spot on the sample (such as surface roughness), then it makes sense to normalize the scatter signal (in watts per steradian) by the incident power.
		In general, a large illumination spot is used to measure extended sources of scatter and a focussed spot for discrete defects.
	www.thescatterworks.com /terms.htm (2505 words)

	ANL/APS/TB-6 (Site not responding. Last check: 2007-11-01)
		The surface metrology laboratory and the deposition system will be located in clean rooms in the APS Experiment Hall.
		The surface metrology laboratory will be used to characterize the figure and the finish of x-ray optics.
		The surface topography of the test piece is determined by calculating the optical path difference between the two beams.
	www.aps.anl.gov /xfd/tech_bulletins/tb6/TB-6.html (1804 words)

	ASPE Lifetime Achievement Awards
		He joined the Physikalisch-Technische Bundesanstalt in 1966 in the “Line Scale Metrology” section and has never lost his love for ultra-precision measurement and the practical realization of the meter which is central to precision engineering.
		He is now a member of the Presidential Board of PTB and the head of PTB metrology activities for industry, the German Calibration Service and the Competence Center for Ultra-precise Surface Figure Measurement.
		Dave's present interest is the rationalization of surface parameters in accordance with the systems approach using what he calls a "function map".
	www.aspe.net /about/awards.html (2663 words)

	Timken - Innovation - Metrology - Surface Topography - Descriptions
		Automated surface topography characterization system (microscope with one integrated XY workpiece stage and two integrated rotary stages (one for radial, one for axially oriented workpieces) plus two comprehensive, stand-alone Matlab-language analysis routines — STOP.m (Surface TOPography.m) and Topo3D.m.
		In general, pits and peaks are defined as features that can be shown statistically to not belong to the core surface after exclusion of outliers, with a defined confidence level (typically 99.95%).
		Four types of parameters are calculated; whole surface, pit summaries, peak summaries, and individual pit and peak parameters.
	www.timken.com /innovation/metrology/Descriptions/Phase.asp (979 words)

	Dimensional Metrology Laboratory (Site not responding. Last check: 2007-11-01)
		Located on the University’s Charlotte Research Institute Campus, the Metrology Lab is one of the core facilities of the Center for Precision Metrology.
		The Lab is central to the education and research efforts in the areas of precision engineering and metrology at UNC-Charlotte, and with the wide variety of high-end measurement instruments, provides measurement services to the University community and local industry.
		In the area of surface metrology, there are a half-dozen contact and non-contact based instruments to measure two and three dimensional surface finish and form.
	www.cpm.uncc.edu /metrology_lab (317 words)

	DMAC Annual Conference 2001
		Usually form, or as it is termed in surface metrology “form error” is a feature of the surface geometry that is removed before the fine scale roughness is assessed.
		Surfaces of thermal and electrical contacts, on the other hand, may require a degree of roughness to improve their conduction properties.
		Problems of surface roughness measurement, inspection and quality control in all these situations are described in terms of currently available instrument technology and characterisation techniques.
	www.npl.co.uk /dmac/meetings/annual_conferences/acm2001 (2765 words)

	Process Metrology (Site not responding. Last check: 2007-11-01)
		Three scanning modes (CD, HD, 1D) make the DEKTAK SXM-320 the industry¡¯s most flexible surface metrology system, enabling it to measure a wide variety of surface features without requiring time-consuming sample preparations or destructive cross sectioning.
		The stylus-based metrology system delivers the industry¡¯s best step height repeatability and highest horizontal resolution, as well as long scan capabilities for 300mm, edge-to-edge scanning.
		Applications include evaluation of overall disk surface texture, roughness of laser and mechanical textured disks, precise determination of park zone and fly zone roughness and location of the various textured zone radii (TZR).
	www.korins.com /maker/veeco/metrology.html (842 words)

	Metrology USA - Taylor Hobson - Metrology USA
		The Centre of Excellence team has access to various Taylor Hobson instruments to measure surface texture, roundness, form, squareness, etc. This allows them to provide the metrology solutions for all kinds of problems, enabling them to advise you which intrument you need.
		These courses are specifically aimed at users, managers and designers who are seeking a practical, “hands on” knowledge of the subject from the experienced user’s perspective.
		We invite all attendees to bring their measurement problems along for discussion during the “hands on” sessions which form part of the courses.
	www.taylor-hobson.com /Metrology-usa.html (851 words)

	Tribology Laboratory - University of Florida
		Metrology is compactly defined by the Oxford English Dictionary as a) A system or series of measures b) the science of weights and measures; thus, surface metrology is the science of measuring surfaces.
		Over the last decade numerous technological advances have made it possible to measure and study surfaces at increasingly greater levels of resolution and accuracy (nm size length scales).
		The course is divided into three distinct portions: (1) measuring techniques and the equipment (2) the mathematics and science of surface characterization (3) The causes and impacts of roughness.
	grove.ufl.edu /~wgsawyer/Courses/syllabuses/roughS06.HTML (254 words)

	Center For Precision Metrology Home Page
		The Center for Precision Metrology is located in the Engineering Research building of the Charlotte Research Institute on the campus of the University of North Carolina at Charlotte.
		The Center for Precision Metrology is a synergistic association of interdisciplinary UNCC Charlotte researchers allied with industry; dedicated to research, application, integration, and education in areas of design, manufacturing, processes, and controls relating to precision metrology.
		Exploration and applications of dimensional measurement to manufacturing and associated state-of-the-art processes with required dimensional tolerances on the order of ten parts per million; critical for remaining agile and competitive in a world economy where trends in all aspects of manufacturing are moving toward tighter tolerances.
	www.cpm.uncc.edu (360 words)

	KLA-Tencor \| Products \| P-16 (Site not responding. Last check: 2007-11-01)
		The P-16 is a new contact stylus profiler designed for automated step height, surface contour, and roughness measurements, and provides detailed 2D and 3D analysis of topography for a variety of surfaces and materials.
		This programmable surface metrology tool is utilized in a wide range of applications and industries.
		The P-16 and P-16OF (3D benchtop surface profiling), Alpha-Step IQ (2D benchtop surface profiling), HRP 240/340 series (high resolution surface profiling) provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding profiling applications.
	www.kla-tencor.com /j/servlet/Product?prodID=153&focus=1 (352 words)

	Digital Holographic Microscopy for Industrial Inspection and Metrology - Industrial Inspection - ISMV Research
		Researchers at ORNL have developed and patented a direct-to-digital holographic imaging technology and prototype system for the inspection and metrology of surface topology and structure.
		Unlike phase-shifting profilometry methods, the phase and amplitude of the imaged object surface can be determined rapidly from a single digital image at high throughput using side-band (heterodyned) analysis.
		The phase information is directly proportional to the structural topology (e.g., surface height) and the index of refraction of the various materials composing the surface.
	www.ornl.gov /sci/ismv/research_industrial_dhm.shtml (262 words)

	XP-1 Surface Finish Metrology Measurement Equipment (Site not responding. Last check: 2007-11-01)
		Whether you are a researcher looking to measure: surface flatness, surface waviness, surface quality, surface topography, and/or surface characterization, the XP profilometer addresses surface finish metrology measurement for a variety of results achieved via surface scanning of substrates, surface texture management, surface imaging, and surface technology.
		Acting as a surface roughness gauge, tester and inspection system; our surface technology utilizes the highest level of industry parameters and standards.
		The XP profilometer equipment is a precision industrial metrology technology instrument, precision metrics tool, inspection apparatus, product resource system and solution offering metrology calibration instrumentation for height measurement; ra surface finish roughness, rms surface finish roughness and rz surface finish testing.
	www.ambiostech.com /XP1-surface-finish-metrology.htm (422 words)

	index (Site not responding. Last check: 2007-11-01)
		We also started to develop our own 'Wintrace' range of upgrades to extend the working life of existing instruments, and to enhance their capabilites.
		Our customers include many famous household names in the aerospace and automotive industries, as well as a large number of smaller companies and research organisations, both in the UK and worldwide.
		We run training courses in basic roundness and surface metrology theory and principles, and for specific instrument operation, and we supply new and re-conditioned instruments and accessories.
	www.metrology.cwc.net (212 words)

	Veeco News & Events (Site not responding. Last check: 2007-11-01)
		Tucson, AZ— April 16, 2002 — Veeco Metrology Group, a world leader in 3D surface metrology, recently introduced the WykoÒ NT1100 Optical Profiler at the Semicon Europa exhibition in Munich, Germany.
		The NT1100 provides accurate, cost-effective surface measurement with Angstrom resolution, as well as stitching automation for large area measurements.
		Veeco Instruments Inc. is a worldwide leader in process equipment and metrology tools for the optical telecommunications/wireless, data storage, semiconductor and research markets.
	www.veeco.com /html/newsandevents_show.asp?PressID=382 (313 words)

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