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Topic: Thin-film deposition


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In the News (Tue 18 Nov 08)

  
 Thin-film deposition - Wikipedia, the free encyclopedia
"Thin" is a relative term, but most deposition techniques allow layer thickness to be controlled within a few tens of nanometers, and some allow one layer of atoms to be deposited at a time.
Deposition techniques fall into two broad categories, based on whether they are understood in terms of chemistry, or of physics.
Chemical vapor deposition (CVD) generally uses a gas-phase precursor, often a halide or hydride of the element to be deposited.
en.wikipedia.org /wiki/Thin-film_deposition   (923 words)

  
 CEI Course #51, Thin Film Deposition and Applications
Thin film technology is pervasive in many applications, including microelectronics, optics, magnetic, hard and corrosion resistant coatings, micro-mechanics, etc. Progress in each of these areas depends upon the ability to selectively and controllably deposit thin films - thickness ranging from tens of ångströms to micrometers - with specified physical properties.
Thin film technology has been the hot topic of solar cell research for a number of years.
Chemical reactions, occurring usually on the surface, are used both in CVD and ALE to deposit thin films on substrate surfaces.
www.cei.se /051.htm   (1849 words)

  
 Method for optimization of thin film deposition
To tailor a film the рrосess соnditiоns аre vаried during the film deposition round where least single of the pressures and temperаtures is vаried by least 10%.
In a particular impIementation, a capacitor dieIectric of siIicon nitride is tailored by vаrying the pressure for the mass film deposition and by vаrying together the temperаture and pressure for the film surfаce formаtion phase.
> Thin film transistor fabrication method, active matrix substrate fabrication method, and liquid crystal display device
www.patentalert.com /docs/000/z00002853.shtml   (172 words)

  
 SR&T Thin Film Deposition Facilities
Sputter deposition is a technique where material from a target plate is removed by bombardment with Ar ions, which are formed in a low pressure plasma.
Before deposition a low pressure glow discharge can be applied for improvement of the adhesion of thecoating.
These processes are unwanted in the e-beam deposition facility.
www.sron.nl /www/srt/code/microstructures/deposition.php   (665 words)

  
 3. Laser Ablation and Thin-Film Deposition
The properties and structure of a YBCO film deposited on silicon substrates with proper buffer layers is discussed, e.g., in Refs.
Under proper process parameters (e.g., the background gas pressure, the substrate temperature, and the laser fluence), the film grows epitaxially and the stoichiometry of the film is a replica of that of the target.
The quality of the deposited film is, above all, determined by the crystallinity of the lattice and the surface smoothness.
www.tkk.fi /Units/AES/projects/prlaser/thesis/node4.html   (4149 words)

  
 MDC Vacuum Products Corp.- Thin Film Deposition Introduction
Thin film deposition of metallic, insulating, conductive and dielectric materials plays an important role in a large number of manufacturing, production and research applications.
This is a versatile deposition tool used for thin film coating processes in high and ultrahigh vacuum environments.
Thin film applications requiring electron beam evaporation are continually increasing.
www.mdc-vacuum.com /searchs/doc/ThinFilmDep-Intro.htm   (858 words)

  
 Electroluminescent Research Group Thin-Film Deposition Systems
Activated Reactive Evaporation (ARE) is the thermal evaporation of a substance in the presence of an activated gas (from a plasma).
Sputtering is particularly useful for depositing multinary compounds, which are very difficult to evaporate due to the different vapor pressures of the constituent elements.
This system is a modified CPA radio-frequency sputtering system which is used to deposit oxide- and sulfide-based phosphor materials, p-type conductors, and occasionally high-dielectric constant dielectric materials.
eecs.oregonstate.edu /matdev/lab/thinfilmdeptools.html   (736 words)

  
 Module No 5 Thin Film Deposition
This section is most relevant to sputter deposition, but also applies to any other process in which fast particles bombard a growing film.
Section V: Modification of Thin Films by Energetic Particles (15 slides)
Details of atomic processors or deposition conditions are not described but may be found in sources listed in the bibliography provided with the text.
www.iuvsta.org /materials_deposition.html   (369 words)

  
 Thin Film Deposition
ORNL scientists are developing advanced thin film materials using Plasma Enhanced Chemical Vapor Deposition (PECVD).
The relationship between thin film quality and process plasma properties is established by using RF impedance analysis, optical emission spectroscopy, and mass spectroscopy.
Our approach has been used to produce high quality thin films of tantalum oxide, silicon nitride, polycrystalline silicon, boron nitride, and carbon nanotubes.
www.ornl.gov /sci/fed/Technology/tsa/tfd/tfd.html   (125 words)

  
 Manufacturing Science & Technology - Thin Films
The Thin Film laboratory within Manufacturing Science and Technology provides a variety of vapor deposition processes and facilities for cooperative research and development.
Deposition of a large variety of thin film materials For a list of elements deposited in the past see attached periodic table (Link to pdf coming soon.)
Deposition of compounds by evaporation in the presence of reactive gas possible
mfgshop.sandia.gov /1400_ext_ThinFilm.htm   (546 words)

  
 Articles - Thin-film optics
In manufacturing, thin film layers can be achieved through the deposition of one or more thin layers of material onto a substrate (usually glass), most often by a physical vapor deposition process such as evaporative or sputtering, or a chemical process such as chemical vapor deposition.
These thin films are used to create optical coatings.
Thin-film optics is the branch of optics which deals with very thin structured layers of different materials.
www.xgrey.com /articles/Thin-film_optics   (288 words)

  
 Thin Film Deposition: Trends, Key Issues, Market Analysis
Thin film deposition processes play a critical role in the production of high-density, high-performance microelectronic products.
A market forecast for Thin Film Deposition Tools is presented to 2008.
Considerable progress has been achieved in the development of deposition processes -- and in the development of the reactor systems in which they are carried out.
www.electronics.ca /reports/semiconductor_manufacturing/thin_film_deposition.html   (322 words)

  
 Handbook of Thin Film Deposition Processes and Technologies, 2nd Ed.
The second edition of the Handbook of Thin Film Deposition includes entirely new chapters on contamination and contamination control, which assume greater and greater importance as dimensions shrink to sub-micron levels.
This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition.
Consistent with this change, the processing for the deposition and patterning of films has received major research and engineering emphasis over the last few decades...Today one can control both the electrical and mechanical properties while achieving uniform and reproducible films from a few atomic layers thick to several micrometers.
www.polysurfacesbookstore.com /pages/3685.html   (349 words)

  
 Thin-Film Deposition
In this Chapter, different approaches aiming at the deposition of high-quality, large-area HTS thin films are studied.
After the deposition, the electrical and the structural properties of the films are measured.
The preparations for the deposition are explained in Section 5.1, and the deposition process as carried through in our system is described step by step in Section 5.2.
www.tkk.fi /Units/AES/projects/prlaser/thesis/node38.html   (99 words)

  
 Thin Film Deposition
Recently we employed similar technique to deposit ZnS thin films on glass.
By minimizing the hydrogen concentration in a CVD environment, we deposited nanocrystalline diamond thin films using hot filament technique.
We also did a comparative study of CdS thin films deposited by several different chemical process.
www.physics.ucf.edu /~lc/thin-film.html   (222 words)

  
 Muscat Research Group -- Projects - Thin Film Deposition
ALCVD is an emerging technology that holds the promise of precise control of high k film thickness and composition, but little is known about the fundamental surface chemistry.
We are studying the nucleation kinetics of ALCVD film growth using temperature programmed reaction spectroscopy (TPRS), in situ attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR), and XPS/Auger spectroscopies.
TPRS provides information on the elementary chemical reaction steps taking place on the surface that lead to film nucleation with a sensitivity on the order of 1/1000th of a monolayer or 1012 atoms/cm2.
www.che.arizona.edu /Directory/Faculty/Muscat/Research/Projects/Thin_Film_Deposition.html   (398 words)

  
 Amazon.com: Thin-Film Deposition: Principles and Practice: Books
Thin film deposition is a broad and burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers.
Thin films are deposited onto bulk materials (substrates) to achieve properties unattainable or not easily attainable in the substrates alone.
However, much of the available thin film literature is based on empirical knowledge, and focuses only on specific processes or applications.
www.amazon.com /exec/obidos/tg/detail/-/0070585024?v=glance   (708 words)

  
 Mantis Deposition - Excellence in thin film deposition.
MANTIS Deposition, a leading manufacturer of UHV deposition equipment, has received a one year grant from the UK Government in the amount of £90,000 for developing an "advanced nanocluster deposition tool".
The project goals are to design and build the "next generation" nanocluster deposition source.
Of 113 companies who applied, only Mantis Deposition was granted approval for a research project.
www.mantisdeposition.com /news.html   (180 words)

  
 thin film cell
A photovoltaic cell formed by depositing thin layers of conductive and semiconductive materials, usually using a chemical vapor deposition (CVD) process.
Also referred to as amorphous cells because they have no crystalline structure, such cells use less material than cells sawn from crystalline ingots.
daviddarling.info /encyclopedia/T/AE_thin_film_cell.html   (123 words)

  
 Nano Layer Deposition; Unique Thin Film Deposition Technology Surpasses Atomic Layer Deposition in Flexibility
NLD allows semiconductor manufacturers to choose from a wide field of deposition precursors (a key limitation of ALD) for the application of any thin film in use today on the surface of a wafer with atomic layer precision.
The market for highly conformal deposition tools, such as ALD and NLD, is one of the fastest-growing segments of the semiconductor device manufacturing space.
NLD technology can also be used to construct complex, compound film structures with a level of control and conformality that was previously unavailable or impractical.
www.physorg.com /news462.html   (705 words)

  
 Thin Film Deposition
The thickness of the film is measured by a quartz crystal monitor inside the jar.
Metals used are typically aluminum or gold and are deposited by thermal evaporation in a bell jar evaporator.
Metals are deposited on the semiconductor devices in order to make electrical contact to the devices.
darkwing.uoregon.edu /~hutchlab/semilab/thinfilm.html   (161 words)

  
 Device Materials Group:thin film deposition
This facility permits ultra-high vacuum deposition of a variety of thin films and heterostructures for a number of projects.
The clickable map below shows the equipment sited in the main thin film deposition laboratory on the ground floor of the Materials Department annexe.
The deposition laboratory also forms part of the facilities of the IRC in Superconductivity.
www.msm.cam.ac.uk /dmg/facilities/deposition   (65 words)

  
 Mantis Deposition - Excellence in thin film deposition.
The deposition of nanoclusters is a leading edge method of producing film characteristics that are unachievable through conventional thin film coating methods.
Mantis Deposition - Excellence in thin film deposition.
Our UHV deposition systems are designed to be extremely versatile with many retrofittable options to meet the demands of future requirements.
www.mantisdeposition.com   (200 words)

  
 Mini lab multi-technique thin film vacuum deposition systems, incorporating sputtering, e-beam, thermal evaporation, OLED, plasma cleaning
Utilising the latest film monitor and control systems, the user is able to set multi—layer runs and control each step of the process and data log events for off line post analysis.
Created by an experienced team of designers with a background in UHV deposition technology, the MiniLab is a fully integrated mini box coater that achieves repeatable and professional results.
The control system is supplied with off line software for setting up of film runs without the need to suffer down time.
www.ceramisis.com /deposition_systems_a1.htm   (702 words)

  
 Thin Film Deposition Control System
Accel created the TFD architecture and models to overcome the client's dissatisfaction with the unpredictable costs associated with developing and maintaining deposition systems.
The TFD software architecture is general and can be easily reapplied to similar system requirements.
TFD applications have several different screens, common to each processing chamber.
www.accelse.com /progress/pro_tfds.html   (420 words)

  
 Compass: Search Results: "thin-film deposition" (Page 1)
Document Number: 407-001 Description The capability exists for deposition of a variety of inorganic and organic thin films on small engineering components, including cylindrical...
Document Number: 513-001 Description IBAD is a thin-film vacuum-deposition process that combines conventional evaporative deposition with low-energy ion bombardment.
Document Number: 511-001 Description We can grow thin diamond films by microwave-enhanced chemical vapor deposition.
compass.anl.gov:60010 /compass?scope=thin-film+deposition&ui=sr&...   (164 words)

  
 CPAM Thin Film Deposition
Teflon-like thin layers and IR transparent films) on inorganic and organic surfaces by involving plasma-state and plasma-induced reaction mechanisms, including template polymerization reaction mechanisms initiated from surfaces with plasma-enhanced crystallynity.
Deposition of novel and conventional macromolecular layers (e.g.
Investigation of the influence of plasma parameters (electron energy distribution, power, frequency, pressure, etc.) on the discharge-induced gas phase molecular fragmentation and surface-mediated plasma-chemistry mechanisms (Figure 1).
cpam.engr.wisc.edu /thinfilm/thin.html   (267 words)

  
 VST Thin Film Deposition
It is our goal to offer the most suitable thin film deposition system and process for your application.
A choice of Electron Beam, Sputtering, Thermal Resistive Evaporation, Ion Beam, Ion Assisted Deposition and Chemical Vapor Deposition are just a few of the possible solutions for your next thin film deposition system.
www.vacuumltd.com /thin-film-deposition/index.php?ln=en&main_id=29   (51 words)

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