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Patent 5679496: Chemically amplified positive resist composition (Site not responding. Last check: 2007-10-26) |
 | | In the formulae, R.sub.1 is a hydrogen atom, alkyl group or alkoxy group, X is a chlorine or bromine atom, Y is trifluoromethanesulfonate or p-toluenesulfonate, letter n is an integer of 0 to 2, m is an integer of 1 to 3, and the sum of n and m is equal to 3. |
 | | In the formulae, R.sub.1 is a hydrogen atom, alkyl group or alkoxy group, X is a chlorine or bromine atom, Y is trifluoromethanesulfonate or p-toluenesulfonate, letter n is an integer of 0 to 2, m is an integer of 1 to 3, and n+m=3. |
 | | A solution of 55.7 g (0.1 mol) of bis(p-tert-butoxyphenyl)phenylsulfonium trifluoromethanesulfonate and 1.5 g (0.01 mol) of trifluoromethanesulfonic acid in 500 g of methanol was heated at 60.degree. |
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