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Topic: Turbomolecular pump


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In the News (Thu 12 Nov 09)

  
  Turbomolecular pump - Wikipedia, the free encyclopedia
Turbomolecular pumps is a form of turbopump used to obtain and maintain high vacuum.
These pumps work on the principe that gas molecules can be given momentum in a desired direction by repeated collision with a rapidly moving solid surface.They use a rapidly spinning turbine rotor to transport gas from the inlet of the pump towards the exhaust in order to create or maintain a vacuum.
The exhaust is generally connected to a backing pump, which produces a pressure low enough for the turbomolecular pump to work efficiently.
en.wikipedia.org /wiki/Turbomolecular_pump   (393 words)

  
 Vacuum pump - Wikipedia, the free encyclopedia
A vacuum pump is a pump that removes gas molecules from a sealed volume in order to leave behind a partial vacuum.
In a turbomolecular pump, the momentum transfer principle is used, accelerating the gas molecules from the vacuum side to the exhaust side (which is usually maintained at a reduced pressure by a positive displacement pump).
The vacuum pump was invented by Otto von Guericke.
en.wikipedia.org /wiki/Vacuum_pump   (496 words)

  
 Turbomolecular pump with improved bearing assembly - Patent 4767265
The turbomolecular pump of claim 1, wherein the ratio of the axial length of said inner working surface of said bearing member to the outer diameter of said journal portion is approximately 1:10.
The turbomolecular pump of claim 1, wherein said radial clearance between the outer cylindrical surface of said journal portion and the generally annular inner working surface of said bearing member is approximately 0.0015 inch.
The turbomolecular pump of claim 1, wherein lateral restraint of the rotor is provided by said improved bearing assembly and a second ball bearing assembly is present to provide bi-directional thrust capability for supporting said rotor during the initial and continued operation of said turbomolecular pump.
www.freepatentsonline.com /4767265.html   (3347 words)

  
 Miniature Turbomolecular Pump for High Vacuum
The miniature turbomolecular pump would be an attractive alternative to currently available high-vacuum sources (including most commercial off-the-shelf turbomolecular pumps), which are too bulky and power-hungry to be practical for use in portable instruments.
The miniature turbomolecular pump would be installed in place of the two ion pumps; its overall size would be similar to that of the combination of two ion pumps but with higher pumping speed.
The pump design must be synthesized in an iterative procedure that involves consideration of blade angles, number of blades per row, hub diameter, and of gaps among rotor blades, stator blades, the hub, and the inner wall of the pump housing.
www.nasatech.com /Briefs/Aug99/NPO20530.html   (570 words)

  
 [No title]   (Site not responding. Last check: 2007-10-29)
Finally, since the getter pump is heated by direct passage of current in series, the heat absorption by the turbomolecular pump is very small in that it is only due to irradiation by the getter elements in a vacuum-environment, being much smaller than the irradiation by a lamp.
A getter pump according to claim 1, wherein said getter device (20) is formed of a one-piece continuous element extending between two contiguous ends (22) and forming with bends (18, 18a) or zigzag-turns a substantially cylindrical surface in proximity and coaxially with respect to the inner surface of said cartridge (10).
A getter pump according to claim 1, wherein said getter device (20) is formed of a sequence of elements in a zigzag arrangement, starting and ending in two contiguous points (22), thus forming a substantially cylindrical surface in proximity of the inner surface of said cartridge (10), being joined together at turning areas (18, 18a).
www.wipo.int /cgi-pct/guest/getbykey5?KEY=98/58173.981223&ELEMENT_SET=DECL   (1920 words)

  
 Pumps
port a 120 l/s ion pump (Perkin Elmer 2070122), a titanium sublimation pump (TSP) (Perkin Elmer 2140411), and a cryoshroud (Perkin Elmer 1001341).
The vertical 360 l/s air-cooled turbomolecular pump (Leybold TMP360V) is separated from the UHV chamber by an 8-in.
In addition to evacuating the UHV chamber, the turbomolecular pump is used to evacuate the inner stage of the two-stage differentially pumped rotary feedthrough (DPRF) (McAllister Technical Services) and the gas-handling system through an additional 2.75-in.
www.wellesley.edu /Chemistry/Chris/pumps.html   (279 words)

  
 5.5.2 High vacuum   (Site not responding. Last check: 2007-10-29)
To achieve high vacuum, an oil diffusion or turbomolecular pump in series with a mechanical pump is used.
Turbomolecular pumps do not have this backstreaming issue and some can be operated horizontally or upside down.
In addition, turbo pumps can often achieve an operational pressure more quickly than a diffusion pump of similar size since in can be started in parallel with the rough pump and one does not have to wait for the pump oil to heat to operational temperature.
www.dsbscience.com /freepubs/forensic_intern/node55.html   (139 words)

  
 Vacuum Heat Treat Furnace - Features   (Site not responding. Last check: 2007-10-29)
Smaller pump ports "choke" the flow of gas from the chamber to the pump, resulting in good vacuum readings on a gauge located near the pump, but poorer vacuum in the work zone where the parts are located.
Since the vacuum pump first removes gas from the chamber, and the chamber then, in effect, sucks gases from the vacuum gauge port, the parts will always be in a better vacuum than what the gauge is indicating.
The turbo pump does not have large amounts of oil to backstream into the process chamber, unlike a diffusion pump.  It is simpler to operate and maintain and does not require water supply and drain plumbing connections or a constant supply of chilled water.
www.rdwebb.com /turbo-feat.htm   (1233 words)

  
 Turbom. pumps   (Site not responding. Last check: 2007-10-29)
The pumping chamber is defined as the volume between the cylinder head and the moveable diaphragm.
In particular, the flow rate through both pumps has to be the same with the condition that the discharge pressure of the wide-range turbomolecular pump is equal to the inlet pressure of the backing pump.
The onset of the steep pressure drop between 0.1 and 1 torr is caused by the pumping effect of the accelerating turbomolecular pump.
www.troja.mff.cuni.cz /~cvs/z1-3.html   (2253 words)

  
 [No title]
For ultra-high vacuum, a dry pump is used in combination with a turbomolecular pump (turbopump) and/or a cryogenic pump (cryopump).
Vacuum pump suppliers introduced a variety of innovations over the last several years, including new high throughput turbo pumps with pumping speeds up to 3000 liters/sec; advanced screw designs; pumps that run at higher temperatures to prevent condensation of particles; and pumps with special coatings to prevent internal corrosion.
Pump suppliers report that dry pumps, introduced about 10 years ago, have almost exclusively replaced oil-sealed rotary vane pumps, which once were the vacuum workhorses of the semiconductor industry.
www.reed-electronics.com /semiconductor/index.asp?layout=articlePrint&articleID=CA169268   (1816 words)

  
 High conductance water pump - Patent 5483803
Therefore, it is common practice to position a cold trap in-line ahead of the diffusion or turbomolecular pump to remove the water vapor as the remainder of the gases in the fluid are drawn by the pump.
To minimize the reduction in conductance to the turbomolecular pump, the support for the plate 42 should be as small in cross-section and length as possible.
In this embodiment, the conduit to the turbomolecular pump is simply a flange 82, and the cryopumping array is a flat plate 80 which extends across the frontal opening of the flange 82.
www.freepatentsonline.com /5483803.html   (4616 words)

  
 Technology Trends Library
Turbomolecular pumps are a popular means of producing that vacuum condition because they are clean, rugged, easy to use and relatively maintenance free.
The Holweck pump uses viscous forces between a smooth cylindrical rotor and the gas (now at some-what higher pressure where viscosity is a useful concept) to drag the gas through spiral channels machined into a stator toward the turbopump's forevacuum end.
E chose to use a relatively long shaft to put the pumping stages right where they are needed (minimizing the plumbing between each chamber and its inlet), the folks who designed the unit in Fig.
www.cgmasi.com /techtrendslibrary/rd_82.html   (2905 words)

  
 Lesker Vacuum Systems Rotary Vane Mechanical Pumps: Technical Notes
Rotary vane pumps are the basic workhorses for the majority of vacuum installations.
Pumps listed for chemical, corrosive, or plasma conditions are constructed from more resistant materials than the normal non-corrosive gas pumps.
In those cases, prepare the pump for an inert Fluid and fill it with one of suitable viscosity.
www.repairfaq.org /sam/vacuum/rvpnotes.htm   (538 words)

  
 RTFTechnologies Turbomolecular Pump Repair
A used older model turbo pump with no controller was acquired on ebay for $50.
Initially the pump was contaminated with carbon deposits and mud from mud diver nests in the rotors.
Motor and pump case are attached to base plate.
www.rtftechnologies.org /general/welch3135turbo.htm   (569 words)

  
 Creare P&T Newsletter Fall 2004
Finally, the pumps must be very efficient, both to allow portable operation with limited power sources and to minimize internal heating and temperature rise.
Creare’s first miniature turbomolecular vacuum pump was very successful and led to a subsequent award and follow-up project to build a vacuum pump an order-of-magnitude smaller in volume.
In these pumps, the shaft is stationary while the outside “case” of the motor turns, functioning as the pump rotor.
www.creare.com /newsletters/04minivacpumps.html   (565 words)

  
 New Page 1
The vacuum pump we use, for example, has two stages: a diaphragm pump (which is like a large fish tank pump) and a turbomolecular pump.
The turbomolecular pump is a turbine that runs at about 90,000 rpms, but will only run in a vacuum.
The box at the bottom of the picture is the other vacuum pump, which is connected to the bright light bulb looking thing underneath the left of the pipes (it looks like a light bulb because it uses a hot filament as an electron source, like in my project).
www.its.caltech.edu /~wyoung/Pics/Plasma/test.htm   (821 words)

  
 MICRO:February 1998:Process Equipment—Vacuum Pumps; by Tadahiro Ohmi, (p 53)
The effective pumping speed of the TMP was calculated from the data shown in Figure 2 and is plotted in Figure 3.
The new TMP was developed by shortening the characteristic distances in the pump, particularly at the entrance—such as the distance of each blade vane and the distance between the rotor blade and the stator blade—to maintain the molecular flow at higher pressures.
In high-gas-flow and large-diameter-wafer processing, the design of the connection between the pumping system and the chamber is extremely important, as is improving the pumps to achieve high-gas-flow conductance and, as a result, a higher effective TMP pumping speed.
www.micromagazine.com /archive/98/02/ohmi.html   (3195 words)

  
 Oxford HeliX   (Site not responding. Last check: 2007-10-29)
A turbomolecular pump (TMP) is a multi-stage axial-flow turbine in which high-speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction.
The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized two-stage rotary vane pump (E2M1.5 incorporated) or an oil free scroll pump to exhaust to atmosphere.
EM Series pumps are rugged mechanical oil-sealed pumps with speeds ranging from.7 to 275 cubic metres per hour.
www.oxfordcryosystems.co.uk /phenix/phenixspecs.html   (336 words)

  
 vacuum-guide.com - turbomolecular vacuum pump - Turbomolekularpumpe - pompe à vide turbomoléculaire ...
The company is engaged in the development, manufacture and support of a wide range of vacuum pumps, systems, boosters and accessories based on a number of technologies and capable of achieving high vacuums down to 10-7 mbar.
BOC Edwards pioneered the oil-free ‘dry’ pump, originally for the semiconductor industry and now markets a series of dry pumps using claw, roots, scroll and combined mechanisms.
The ion pump, used for achieving ultra-clean vacuum environments, was invented by Varian Associates, Inc.1 in the 1950s — initially for evacuating its own high-frequency microwave tubes.
www.vacuum-guide.com /firmenlisten/produkte/turbomolecular_pump.htm   (899 words)

  
 Articles - Vacuum   (Site not responding. Last check: 2007-10-29)
By repeatedly closing off a compartment of the vacuum and exhausting it, it is possible to pump air out of a chamber of fixed size in a manner analogous to pumping a milkshake out of a glass.
The two main types of molecular pumps are the diffusion pump and the turbomolecular pump.
As with mechanical pumps, the base pressure will be reached when leakage, outgassing, and backstreaming equal the pump speed, but now minimizing leakage and outgassing to a level comparable to backstreaming becomes much more difficult.
www.wholez.com /articles/Vacuum   (3023 words)

  
 Pfeiffer-Vacuum Compact Turbo Pump, TMH 071P Turbomolecular drag pump, TMH 261 Turbomolecular pump, TMH 262 ...
Pumping speed: for N2 60 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-7 mbar, Gas throughput for N2 2,2 mbar l/s, Fore Vacuum max.
Pumping speed: for N2 920 l/s, Ultimate pressure with rotary vane pump < 5·10-10 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 20 mbar l/s, Fore Vacuum max.
Pumping speed: for N2 2100 l/s, Ultimate pressure with HV pump and rotary vane pump < 1·10-10 mbar, Ultimate pressure with rotary vane pump < 1·10-9 mbar, Gas throughput for N2 5 mbar l/s, Fore Vacuum max.
www.ajvs.com /index.php?pid=54   (1360 words)

  
 [No title]   (Site not responding. Last check: 2007-10-29)
The reason for using a turbomolecular dry pump is to minimize the possibility that oil and other material will backstream into the detector dewar and contaminate the detector.
The pump is the fl metal box at the bottom of the pumping station.
If the dewar being pumped has been open for some time you may want to pump for 15 minutes to 1 hour to allow the dewar to outgas.
www.ccd.ucolick.org /lab-safety/vacuumsop.html   (616 words)

  
 Turbomolecular Pumps Adixen Alcatel & West Technology UK
The ATP conventional turbomolecular pumps have a proven track record of reliability.
With pumping speeds from 80 to 900 l/s, ATP pumps are often used in industrial applications, analytical instruments and RandD labs where reliability, performance and cost effectiveness are essential.
The ATP turbomolecular pump design is focused on reliability.
www.west-technology.co.uk /alcatel/turbomole.htm   (247 words)

  
 Leybold Repair by Tech Services, Inc
The pump is balanced with a Schenck Vibroport 41 to meet or exceed Leybold vibration specifications.
The turbomolecular pump is helium leak tested to insure proper vacuum levels.
A declaration of contamination form must be completed before any service will be performed on turbomolecular pumps.
www.leyboldrepairbytechservices.com   (223 words)

  
 Corrosive Turbo Pump, Pfeiffer Vacuum Turbo Pump, TMH 1001 PCH, TMH 1601 PCH, TMU 1001 PCH, TMU 1601 PCH, TPH 2101 PC, ...
Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max.
Pumping speed: for N2 175 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 3 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas.
Pumping speed: for N2 430 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 8 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas.
www.ajvs.com /index.php?pid=55   (2000 words)

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