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| | Corrosive Turbo Pump, Pfeiffer Vacuum Turbo Pump, TMH 1001 PCH, TMH 1601 PCH, TMU 1001 PCH, TMU 1601 PCH, TPH 2101 PC, ... |
 | | Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. |
 | | Pumping speed: for N2 175 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 3 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. |
 | | Pumping speed: for N2 430 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 8 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. |
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