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Topic: Wafer prober

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	Automatic wafer prober having a probe scrub routine - Patent 4590422 (Site not responding. Last check: 2007-10-08)
		Heretofore, automatic wafer probers have included a means for allowing the operator to gain access to the probe tips with an emery cloth for cleaning of the tips by hand.
		The usual sequence of events is for a vacuum chuck 12, on which the wafer 10 to be tested is mounted, to be raised up in the vertical or Z axis direction under the influence of a pneumatic cylinder or solenoid 13.
		The test sequences are developed in the tester 15 which is external to the prober 11 and through electrical connections to the probes 14, on their support ring 16, it applies the test signal to the die under test and monitors the die response to the test sequence.
	www.freepatentsonline.com /4590422.html (3549 words)

	United States Patent Application: 0040092049
		In the prober and in one cassette out of plural cassettes, each containing wafers with an integrated circuit formed thereon, a predetermined cassette is replaced with another cassette after the end of processing of the predetermined cassette, and it is thereby made possible to continuously conduct an electrical characteristic test for the wafers.
		The probers 1 are each provided for testing, chip by chip, an electrical characteristic of a predetermined integrated circuit formed on a wafer in the wafer processing step.
		The prober I may be of an existing hardware configuration, but the software thereof has been modified so as to be applicable to a multi-item continuous lot check in the prober and so as to permit an automatic change of item parameters and measurement temperatures corresponding to various items.
	appft1.uspto.gov /netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=/netahtml/PTO/srchnum.html&r=1&f=G&l=50&s1="20040092049".PGNR.&OS=DN/20040092049&RS=DN/20040092049 (6591 words)

	Automatic wafer prober with programmable tester interface - Patent 4500836 (Site not responding. Last check: 2007-10-08)
		An automatic wafer prober is interfaced with any one of a number of different die testers by storing in memory associated with the wafer prober a plurality of sets of data there being one set of data for each of a plurality of different die testers to be interfaced to the prober.
		The wafer prober employs the stored data for determining the pulse width of the test start signal fed from the wafer prober to the die tester to initiate test of the die, whereby the wafer prober will operate with a plurality of different die testers employing different pulse widths of the test start signal.
		The test sequences are developed in the tester 15 which is external to the prober 11 and through electrical connections to the probes 14 on their support ring 16 it applies the test signals to the die under test and monitors the die's response to the test sequence.
	www.freepatentsonline.com:9003 /4500836.html (4445 words)

	[No title] (Site not responding. Last check: 2007-10-08)
		The wafer is typically held on a vacuum platform of a host test machine such as a probing station which electrically tests the circuits on the wafer.
		The prober includes a group of electrical probes which, in conjunction with a tester, apply predetermined electrical excitations to various predetermined portions of the circuits on the wafer and sense the circuits'responses to the excitations.
		Conventional wafer chucks used for temperature cycling are typically mounted on the prober support structure in a manner which provides for good thermal conduction between the chuck and the prober support structure.
	www.wipo.int /cgi-pct/guest/getbykey5?KEY=99/34412.990708&ELEMENT_SET=DECL (7810 words)

	Chip Scale Review Online
		The prober then finds that target on a subsequent wafer and locates it again on other die that are a chosen number of strategic die locations away.
		The size of 300mm wafers presents a unique challenge to system vendors, because the weight and rigidity of the chuck must be increased to accommodate the larger size of the wafers and the rigidity needed to support massively high parallel testing.
		The wafer prober then locates the fiducial mark and downloads the known pin locations, allowing the exact location of each probe card pin to be identified for fast, accurate alignment.
	www.chipscalereview.com /archives/ES/issues/0103/f3_02.php (1117 words)

	More than Pass or Fail
		Even though wafer probing is an essential step in the semiconductor manufacturing process, it does not mean we should spend a lot of time testing the wafers.
		When the wafer is on the wafer prober, all production steps have been performed and the wafer identification can be partly covered by a metal layer for example.
		Most wafer prober users have their own specific requirements with regards to file formats, lot start routines, probe card touch down counters, alarm levels, monitor requirements, automatic report generation, and so on.
	www.salland.com /news/morethanpassfail.html (995 words)

	Wafer_Prober (Site not responding. Last check: 2007-10-08)
		This is calculated by taking the first gate contact to be central at 0.15 mm from any side of the pad, then after moving a maximum of thirty devices horizontal across the wafer the worst case allowable would be if the gate contact is made at the edge of the pad.
		However the wafer prober (photo plotter) is integrated with the rest of the ATE so that a whole wafer can be tested automatically.
		Accurate positioning of the wafer on the photo-plotter might seem to be a problem.
	www.ee.umist.ac.uk /mmd/hotfet/Techinfo/Wafer_Prober.htm (343 words)

	BREAK THROUGH (Site not responding. Last check: 2007-10-08)
		The accuracy was later measured on a number of wafers by measuring the probe marks on an off line measurement system.
		wafer probers can easily and inexpensively be upgraded to meet or exceed the stepping accuracy of new systems that can cost 5X to 15X of this upgrade.
		wafer probers, but will carry it well on into the next century at a very reasonable upgrade cost.
	www.wafer-prober.com /break.htm (318 words)

	Advanced Packaging - Strip Testing: Uniformity in Final Package Test
		The use of an electronic wafer map forms the basis for the 1990s paradigm of a data centric sort floor, where yield, throughput and costs are dramatically improved through automation.
		Probers are routinely controlled via a network interface where they automatically load the appropriate product files and test routines based on analysis of the wafer they have loaded.
		In the wafer prober arena, we've seen that wafer fabrication technology is now required to probe 300-mm wafers in production due to decreasing geometries and throughput/cost pressure, and also are observing that probers are required to probe package strips at final test for the very same reasons.
	ap.pennnet.com /Articles/Article_Display.cfm?Article_ID=190562&CFID=330816&CFTOKEN=68007119 (2286 words)

	Filtronic Solid State Purchases Electroglas Probers for Testing On Thin Wafers (May 2000) - News - Compound ...
		The prober accepts the film frames in cassettes, extracts and transfers them to the probe chuck with a special electromagnetic arm, secures them on the chuck using electromagnetic grippers, precisely steps them for wafer probing, then returns them to the cassette, without damage to the wafer.
		Backlapped wafers that remain strong enough to be held at their edges inside a cassette but sag, warp and flex can be safely handled and tested by 4090(mu) probers adapted for them.
		The company's wafer probers, inspection systems and software solutions server as data collection, management and analysis tools that semiconductor manufacturers depend upon to improve their productivity and process control by optimizing sort-floor efficiency.
	www.compoundsemiconductor.net /articles/news/4/5/57/1 (653 words)

	[No title] (Site not responding. Last check: 2007-10-08)
		The wafer is typically held stationary relative to a vacuum support surface of a prober machine which electrically tests the circuits on the wafer.
		The prober support structure for the chuck is then used to locate the wafer under the probes as required to perform the electrical testing on the wafer circuits.
		During the calibration, temperature of the wafer at the top surface can be determined by a surface-mounted thermocouple or other temperature sensor, or by using a calibrated diode on the wafer, or by some other technique; and a correction factor is generated which identifies the temperature differential between sensor T1 and the wafer surface.
	www.wipo.int /cgi-pct/guest/getbykey5?KEY=99/34159.990708&ELEMENT_SET=DECL (9798 words)

	[No title] (Site not responding. Last check: 2007-10-08)
		As wafers get larger and thinner and dies get smaller, many back-end processes are moving to the front end of the semiconductor manufacturing process-where the package goes, the test is soon to follow.
		The new Electroglas prober manipulates delicate wafers by means of adhesive, film-based frames that carry the wafers from grinding or thinning operations, through probing to the dicing steps.
		The prober accepts wafers on the film frames in cassettes, extracts and transfers them to the probe chuck with a special electromagnetic arm, secures them on the chuck by electromagnetic grippers, steps them for probing, then returns the wafers to the cassette.
	www.reed-electronics.com /Electronicnews/index.asp?layout=articlePrint&articleID=CA49497 (490 words)

	FemtoTek, Inc.: Products for Semiconductor Measurement (Site not responding. Last check: 2007-10-08)
		LabVIEW Driver for the Electroglas 4080 and 4090 Prober provides a library of sub-VI's that can be used to set up and control the wafer prober via the GPIB interface.
		LabVIEW Driver for the Electroglas 2080 Prober provides a library of sub-VI's that can be used to set up and control the wafer prober via the GPIB interface.
		LabVIEW Driver for the Electroglas 2001 Prober provides a library of sub-VI's that can be used to set up and control the wafer prober via the GPIB interface.
	www.femtotek.com /prober.php (293 words)

	Wafer Probers and Wafer Prober (Site not responding. Last check: 2007-10-08)
		Derived from Wentworthâs exclusive Pegasus LED wafer prober platform, the Pegasus S200 LSC prober is integrated with the latest scanning and image recognition technology to deliver the fastest LED scanning and probing performance available.
		Wentworth Laboratories, INC. MP 1008 The MP 1008, manual prober for 8-inch wafers, is a versatile and economical solution for general diagnostic probing, engineering test and failure analysis of microcircuits.
		The Micromanipulator Company 8000 As wafers grew to eight inches and line widths become smaller, the demand for greater stability and ease of use in probing stations intensified over the previous industry standard.
	www.etesters.com /search/product/listAll.cfm/keyword/Wafer_Probers (985 words)

	Wafer Probing Systems
		The actual small wafer structures cannot be observed in a light microscope anymore.
		Therefore only two instruments can be used: the AFM expanded to a Wafer Prober or the SEM equipped with Wafer Prober.
		The manipulators resolution of 2 nm is by far enough to hit any existing wafer structure, also in the next years.
	www.nanomotor.de /s_sem_waferprober.htm (515 words)

	Advantech - Industrial Automation - Applications (Site not responding. Last check: 2007-10-08)
		It is connected to the wafer reader via RS-232 (or USB port) and wafer prober via RS-232 (or LAN) depending on the facility equipment.
		The wafer prober will request the controller to initiate the reading action to the wafer reader.
		l Upgrading older probers with the ID Kit allows you to track the most modern wafers, extending the useful life of the equipment for a greater return on your investment.
	www.advantech.com /ia/applications/CMScontent.asp?doc_id={2F365441-B959-4AFD-93D2-574FB7837E1 (455 words)

	Using IC-CAP with HP 4062UX and Prober/Matrix Drivers
		Prober control is determined by the number of test modules, which is either single or multiple per die.
		The operator first indicates to the prober where the test module is on the first die.
		However, if the given prober conforms to the IEEE 488 standard, it is possible to put the prober on the same GPIB with other instruments.
	eesof.tm.agilent.com /docs/iccap2004/icref/icref026.html (996 words)

	PCP-100SL Framed Wafer Prober
		We are proud to offer the PCP-100 series of probers for thin or mounted wafers.
		The Precision Compensation Prober (PCP)-100 probes thin wafers, mounted wafers, un-diced or already diced wafers, or wafers in special arrays.
		PCP-100 base model is semiautomatic while the PCP-100SL prober adds automatic loading, alignment and probing from the cassette.
	www.semispec.com /Products/ProbingSystems/PCP-100SL/PCP-100SL.htm (162 words)

	Chip Scale Review Magazine (Site not responding. Last check: 2007-10-08)
		Back in the day of 75mm wafers (3"), not only did we still use inches as a measurement, but the wafer prober was a desktop unit which usually sat on an open manufacturing floor with package test.
		The prober was light enough to be carried by a couple of people, moved on a wheeled cart, and cost about $40k fully loaded.
		A 300mm (12") prober is a modern miracle compared to its early predecessors.
	www.chipscalereview.com /issues/1005/article.php?type=dept&article=test_topics (565 words)

	58153 LED Wafer/ Chip Prober
		Chroma 58153 LED Wafer/Chip Prober System is a precision machine specifically designed for probing applications involving LED or Laser Diode wafers/chips from 2" to 8".
		A state of the art vision system with industrial camera, video capture board, and image processing software is incorporated in the 58153 prober system to support high speed automatic production test applications at the wafer stage, or at the die level.
		Chroma 58153 is constructed with ultra high purity ball screws, high precision linear motion guide, 4-axis high force, beryllium copper and tungsten probe needles, and high spindle micro stepping motors, all within a computer designed platform to minimize vibration and acoustic noise.
	www.chromaate.com /english/product/detail.asp?gid=120&id=1415 (422 words)

	ITL Cold Wafer Probing
		The goals of this system are to evaluate devices for front and back illuminated packaging, to provide rapid feedback to CCD manufacturers concerning device performance, particularly for new devices and device technologies, and to allow cryogenic and imaging characterization of other devices and device structures.
		The probing system consists of an Electroglas 2001x automated wafer prober equipped with a Temptronic 6" cold chuck, a controlled environmental enclosure, a Keithley matrix switching system, DC test equipment, and a San Diego State University CCD controller connected to a workstation running IRAF under Linux.
		The prober controller currently uses one readout channel, but can be upgrade to a 4 output system if necessary.
	www.itl.arizona.edu /Technologies/probing/probing.html (773 words)

	wafer chuck ATT Systems Thermochuck chucks wafer prober thermal vacuum platform hotchuck Temperature Control
		With more than 10 years of experience in developing thermal wafer chuck and wafer prober systems our team began searching for the answers it needed to develop a new generation.
		A thermal wafer chuck that would combine uncompromising performance with exceptional specifications.
		By focusing on technology innovation and customer satisfaction our products are designed to be the highest quality and revolutionary in their effect.
	www.att-systems.com /wafer-chuck.htm (147 words)

	Electroglas Unveils NETprobing Technology
		(Nasdaq:EGLS), a leading supplier of wafer probers and prober-based test handling solutions for the semiconductor industry, today announced the introduction of its new NETprobing technology, delivering a networked system of "smart" probers that improve overall test floor efficiency through remote monitoring and control, as well as automated data collection, analysis and reporting.
		NETprobing technology will be demonstrated on the latest model of Electroglas' flagship 300mm prober -- the EG5/300 NETprober -- in booth #10718 in McEnery Hall during the Final Manufacturing portion of SEMICON West 2003, being held July 16-18 at the San Jose Convention Center.
		Electroglas is a supplier of innovative probers, prober-based test handlers, test automation software and services that improve the overall effectiveness of semiconductor manufacturers' wafer and device testing processes by delivering faster answers to questions about device quality, manufacturing performance and corrective action needed.
	quickstart.clari.net /qs_se/webnews/wed/ad/Bca-electroglas.RwLU_DlE.html (514 words)

	Electronic News: Electroglas Inc. Debuts New Probers - Product Announcement (Site not responding. Last check: 2007-10-08)
		The EG4200 is based on the architecture of Electroglas' Horizon 4090 wafer probers, retaining the footprint, software and tester interfaces of the 4090 models.
		Electroglas noted that wafers with solder-bumped interconnects are becoming more common in the semiconductor industry; bumped wafers tend to rely on probe cards that require as much as 15 to 20g of vertical force per pin vs. the 9 to 12g per pin required by traditional cantilevered probe cards.
		The 300mm wafer prober enables probe-to-pad accuracy of better than plus-or-minus 4 microns, while the stepping accuracy is specified at better than 1.5 microns and is capable of moving at speeds greater than 20 inches per second with an acceleration of 1G.
	www.findarticles.com /p/articles/mi_m0EKF/is_33_45/ai_55915040 (741 words)

	Electroglas, Inc. -
		Electroglas’ innovative wafer probers, prober-based test handlers, test floor management software and services improve the overall effectiveness of semiconductor wafer and device testing processes by delivering faster answers to critical questions about device quality, manufacturing performance and corrective action needed.
		Our range of 200mm and 300mm probers were the first to offer such breakthroughs as frictionless motion, non-contact edge sensing and fiducial alignment, helping customers optimize their manufacturing process and achieve better yields.
		Electroglas test floor management software provides a unique, networked solution to connect wafer probers and test handlers to the broader testing infrastructure, allowing the chipmaker to better manage overall test effectiveness by more accurately and efficiently monitoring, analyzing and improving important processes.
	ir.electroglas.com (443 words)

	Prober Drivers
		A prober driver is a set of USERC functions designed to control an IC wafer prober from an IC-CAP macro program.
		This function takes a GPIB address of the prober, flat orientation, prober type name, and a raw GPIB interface name to which the prober is connected.
		Set the SUMMIT 10000 prober to Remote manually after this function to move the chuck to its Load position and turn the mode to Manual for wafer alignment.
	eesof.tm.agilent.com /docs/iccap2002/ic_ref/icir022.html (1683 words)

	For Sale, Used Semiconductor Equipment, Surplus Semiconductor Equipment, Representatives
		ALESSI / CASCADE REL 4800 8" Wafer Prober with four Cascade Microtech MS Series Programmable Micropositioners and an EXC-56 Expansion Module, includes an FS-50 Microscope Head with eyepieces, appears to be in very good cosmetic condition.
		EEC&S RM 0406 Analytical Wafer prober, Demo Unit.
		ELECTROGLAS 2001X Prober conversions to 8" wafer size, This process takes your standard 2001X and makes into an 8" wafer prober; A handler can be added for an additional $25, 000.
	www.caeonline.com /saleview.html?Category=probers (503 words)

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